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Umesh M. Kellkar
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Santa Clara, CA, US
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last 30 patents
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Patent Grant
Methods for contact clean
Patent number
8,642,473
Issue date
Feb 4, 2014
Applied Materials, Inc.
Mei Chang
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHODS FOR CONTACT CLEAN
Publication number
20120225558
Publication date
Sep 6, 2012
Applied Materials, Inc.
MEI CHANG
H01 - BASIC ELECTRIC ELEMENTS