Urs Wegmann

Person

Oberschan, CH

People

Patents Grantslast 30 patents

Information Patent Grant
Process and apparatus for sputter etching or sputter coating
- Patent number 6,248,219
- Issue date Jun 19, 2001
- Unaxis Balzers Aktiengesellschaft
- Klaus Wellerdieck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cathode arrangement
- Patent number 5,343,112
- Issue date Aug 30, 1994
- Balzers Aktiengesellschaft
- Urs Wegmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for controlling evaporation for vapor deposition
- Patent number 5,277,938
- Issue date Jan 11, 1994
- Balzers Aktiengesellschaft
- Urs Wegmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron beam generator and emission cathode
- Patent number 5,159,234
- Issue date Oct 27, 1992
- Balzers Aktiengesellschaft
- Urs Wegmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for the control of an evaporation process
- Patent number 5,041,712
- Issue date Aug 20, 1991
- Balzers Aktiengesellschaft
- Urs Wegmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for the cooling of targets as well as cooling device for tar...
- Patent number 5,039,913
- Issue date Aug 13, 1991
- Balzers Aktiengtesellschaft
- Urs Wegmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for the deflection of a beam
- Patent number 5,038,044
- Issue date Aug 6, 1991
- Balzers Akteingesellschaft
- Urs Wegmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process and system for the control of the focusing of a beam of mon...
- Patent number 5,021,669
- Issue date Jun 4, 1991
- Balzers Aktiengesellschaft
- Urs Wegmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and control arrangement for the evaporation rate of an elect...
- Patent number 5,003,151
- Issue date Mar 26, 1991
- Balzers Aktiengesellschaft
- Urs Wegmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor source for vacuum coating installation
- Patent number 4,748,935
- Issue date Jun 7, 1988
- Balzers Aktiengesellschaft
- Urs Wegmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for coating materials by cathode sputtering
- Patent number 4,622,121
- Issue date Nov 11, 1986
- Balzers Aktiengesellschaft
- Urs Wegmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Urs Wegmann

Person

Patents Grantslast 30 patents

Process and apparatus for sputter etching or sputter coating

Cathode arrangement

Method for controlling evaporation for vapor deposition

Electron beam generator and emission cathode

Method for the control of an evaporation process

Method for the cooling of targets as well as cooling device for tar...

Method and device for the deflection of a beam

Process and system for the control of the focusing of a beam of mon...

Method and control arrangement for the evaporation rate of an elect...

Vapor source for vacuum coating installation

Apparatus for coating materials by cathode sputtering