Uwe Behringer

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Ammerbuch, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for repairing lithographic transmission masks
- Patent number 4,751,169
- Issue date Jun 14, 1988
- International Business Machines Corporation
- Uwe Behringer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of making trenches with substantially vertical sidewalls in...
- Patent number 4,589,952
- Issue date May 20, 1986
- International Business Machines Corporation
- Uwe Behringer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Error-corrected corpuscular beam lithography
- Patent number 4,578,587
- Issue date Mar 25, 1986
- International Business Machines Corporation
- Uwe Behringer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam projection lithography
- Patent number 4,554,458
- Issue date Nov 19, 1985
- International Business Machines Corporation
- Uwe Behringer
- B82 - NANO-TECHNOLOGY