Uwe Bruno Heini Stamm

Person

Goettingen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Radiation source
- Patent number 9,632,419
- Issue date Apr 25, 2017
- ASML Netherlands B.V.
- Jan Bernard Plechelmus Van Schoot
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, EUV radiation generation apparatus and devi...
- Patent number 9,110,377
- Issue date Aug 18, 2015
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Source collector, lithographic apparatus and device manufacturing m...
- Patent number 9,091,944
- Issue date Jul 28, 2015
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV radiation generation apparatus
- Patent number 8,547,525
- Issue date Oct 1, 2013
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Radiation system and lithographic apparatus
- Patent number 8,368,040
- Issue date Feb 5, 2013
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and device for producing extreme ultraviolet radiation or so...
- Patent number 7,619,232
- Issue date Nov 17, 2009
- XTREME Technologies GmbH
- Martin Schmidt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser gas replenishment method
- Patent number 7,266,137
- Issue date Sep 4, 2007
- Lambda Physik AG
- Hans-Stephan Albrecht
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tunable laser with stabilized grating
- Patent number 7,075,963
- Issue date Jul 11, 2006
- Lambda Physik AG
- Dirk Basting
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Absolute wavelength calibration of lithography laser using multiple...
- Patent number 7,006,541
- Issue date Feb 28, 2006
- Lambda Physik AG
- Peter Lokai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser gas replenishment method
- Patent number 6,965,624
- Issue date Nov 15, 2005
- Lambda Physik AG
- Hans-Stephan Albrecht
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arrangement for monitoring the energy radiated by an EUV radiation...
- Patent number 6,894,285
- Issue date May 17, 2005
- Xtreme technologies GmbH
- Juergen Kleinschmidt
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Radiation source for generating extreme ultraviolet radiation
- Patent number 6,882,704
- Issue date Apr 19, 2005
- Xtreme technologies GmbH
- Guido Schriever
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrical excitation circuit for a pulsed gas laser
- Patent number 6,862,307
- Issue date Mar 1, 2005
- Lambda Physik AG
- Rustem Osmanow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for compensation of beam property drifts detec...
- Patent number 6,822,977
- Issue date Nov 23, 2004
- Lambda Physik AG
- Uwe Stamm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radiation source with high average EUV radiation output
- Patent number 6,815,900
- Issue date Nov 9, 2004
- Xtreme technologies GbmH
- Imtiaz Ahmad
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Precise monitor etalon calibration technique
- Patent number 6,807,205
- Issue date Oct 19, 2004
- Lambda Physik AG
- Hans-Stephan Albrecht
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excimer or molecular laser with optimized spectral purity
- Patent number 6,785,316
- Issue date Aug 31, 2004
- Lambda Physik AG
- Igor Bragin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Corona preionization assembly for a gas laser
- Patent number 6,757,315
- Issue date Jun 29, 2004
- Lambda Physik AG
- Igor Bragin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wavelength and bandwidth monitor for excimer or molecular fluorine...
- Patent number 6,717,973
- Issue date Apr 6, 2004
- Lambda Physik AG
- Dirk Basting
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Energy stabilized gas discharge laser
- Patent number 6,714,577
- Issue date Mar 30, 2004
- Lambda Physik AG
- Uwe Stamm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Preionization arrangement for gas laser
- Patent number 6,650,679
- Issue date Nov 18, 2003
- Lambda Physik AG
- Igor Bragin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Preionization arrangement for a gas laser
- Patent number 6,618,422
- Issue date Sep 9, 2003
- Lambda Physik AG
- Igor Bragin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for compensation of beam property drifts detec...
- Patent number 6,618,403
- Issue date Sep 9, 2003
- Lambda Physik AG
- Uwe Stamm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for wavelength calibration
- Patent number 6,608,848
- Issue date Aug 19, 2003
- Lambda Physik AG
- Jürgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonator for single line selection
- Patent number 6,603,788
- Issue date Aug 5, 2003
- Lambda Physik AG
- Klaus Wolfgang Vogler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excimer or molecular fluorine laser having lengthened electrodes
- Patent number 6,570,901
- Issue date May 27, 2003
- Lambda Physik AG
- Uwe Stamm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Line-narrowing module for high power laser
- Patent number 6,560,254
- Issue date May 6, 2003
- Lambda Physik AG
- Uwe Stamm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Discharge unit for a high repetition rate excimer or molecular fluo...
- Patent number 6,556,609
- Issue date Apr 29, 2003
- Lambda Physik AG
- Igor Bragin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Molecular fluorine laser with spectral linewidth of less than 1 pm
- Patent number 6,546,037
- Issue date Apr 8, 2003
- Lambda Physik AG
- Uwe Stamm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser beam monitoring apparatus and method
- Patent number 6,516,013
- Issue date Feb 4, 2003
- Lambda Physik AG
- Rainer Patzel
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Radiation Source
- Publication number 20140253894
- Publication date Sep 11, 2014
- ASML Netherland B.V.
- Jan Bernard Plechelmus Van Schoot
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHIC APPARATUS, EUV RADIATION GENERATION APPARATUS AND DEVI...
- Publication number 20130141709
- Publication date Jun 6, 2013
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and Device for Producing Extreme Ultraviolet Radiation or So...
- Publication number 20080116400
- Publication date May 22, 2008
- Martin Schmidt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser gas replenishment method
- Publication number 20060056478
- Publication date Mar 16, 2006
- Hans-Stephen Albrecht
- G02 - OPTICS
Information Patent Application
Laser gas replenishment method
- Publication number 20040252740
- Publication date Dec 16, 2004
- Lambda Physik AG
- Hans-Stephan Albrecht
- G02 - OPTICS
Information Patent Application
Radiation source with high average EUV radiation output
- Publication number 20040145292
- Publication date Jul 29, 2004
- XTREME technologies GmbH;
- Imtiaz Ahmad
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Radiation source for generating extreme ultraviolet radiation
- Publication number 20040135517
- Publication date Jul 15, 2004
- XTREME technologies GmbH;
- Guido Schriever
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Absolute wavelength calibration of lithography laser using multiple...
- Publication number 20030210715
- Publication date Nov 13, 2003
- Lambda Physik AG
- Peter Lokai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Arrangement for monitoring the energy radiated by an EUV radiation...
- Publication number 20030146391
- Publication date Aug 7, 2003
- XTREME technologies GmbH;
- Juergen Kleinschmidt
- G01 - MEASURING TESTING
Information Patent Application
Very narrow band excimer or molecular fluorine laser
- Publication number 20020186741
- Publication date Dec 12, 2002
- Lambda Physik AG
- Jurgen Kleinschmidt
- G01 - MEASURING TESTING
Information Patent Application
Molecular fluorine laser with spectral linewidth of less than 1 pm
- Publication number 20020110158
- Publication date Aug 15, 2002
- Uwe Stamm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Molecular fluorine laser with spectral linewidth of less than 1 pm
- Publication number 20020075933
- Publication date Jun 20, 2002
- Lambda Physik AG
- Uwe Stamm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Line-narrowing module for high power laser
- Publication number 20020075932
- Publication date Jun 20, 2002
- Lambda Physik AG
- Uwe Stamm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wavelength and bandwidth monitor for excimer or molecular fluorine...
- Publication number 20020018505
- Publication date Feb 14, 2002
- Lambda Physik AG
- Dirk Basting
- G01 - MEASURING TESTING
Information Patent Application
Electrical excitation circuit for a pulsed gas laser
- Publication number 20020015430
- Publication date Feb 7, 2002
- Lambda Physik AG
- Rustem Osmanow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Tunable laser with stabilized grating
- Publication number 20020012374
- Publication date Jan 31, 2002
- Dirk Basting
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for wavelength calibration
- Publication number 20020012368
- Publication date Jan 31, 2002
- Lambda Physik AG
- Jurgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Excimer or molecular fluorine laser having lengthened electrodes
- Publication number 20020001330
- Publication date Jan 3, 2002
- Uwe Stamm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Discharge unit for a high repetition rate excimer or molecular fluo...
- Publication number 20010050938
- Publication date Dec 13, 2001
- Lambda Physik AG
- Igor Bragin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for compensation of beam property drifts detec...
- Publication number 20010042840
- Publication date Nov 22, 2001
- Uwe Stamm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Detector with frequency converting coating
- Publication number 20010040905
- Publication date Nov 15, 2001
- Lambda Physik AG
- Uwe Stamm
- G01 - MEASURING TESTING
Information Patent Application
Preionization arrangement for a gas laser
- Publication number 20010036216
- Publication date Nov 1, 2001
- Igor Bragin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Discharge unit for a high repetition rate excimer or molecular fluo...
- Publication number 20010033594
- Publication date Oct 25, 2001
- Lambda Physik AG
- Igor Bragin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Discharge unit for a high repetition rate excimer or molecular fluo...
- Publication number 20010030986
- Publication date Oct 18, 2001
- Lambda Physik AG
- Igor Bragin
- H01 - BASIC ELECTRIC ELEMENTS

Uwe Bruno Heini Stamm

Person

Patents Grantslast 30 patents

Radiation source

Lithographic apparatus, EUV radiation generation apparatus and devi...

Source collector, lithographic apparatus and device manufacturing m...

EUV radiation generation apparatus

Radiation system and lithographic apparatus

Method and device for producing extreme ultraviolet radiation or so...

Laser gas replenishment method

Tunable laser with stabilized grating

Absolute wavelength calibration of lithography laser using multiple...

Laser gas replenishment method

Arrangement for monitoring the energy radiated by an EUV radiation...

Radiation source for generating extreme ultraviolet radiation

Electrical excitation circuit for a pulsed gas laser

Method and apparatus for compensation of beam property drifts detec...

Radiation source with high average EUV radiation output

Precise monitor etalon calibration technique

Excimer or molecular laser with optimized spectral purity

Corona preionization assembly for a gas laser

Wavelength and bandwidth monitor for excimer or molecular fluorine...

Energy stabilized gas discharge laser

Preionization arrangement for gas laser

Preionization arrangement for a gas laser

Method and apparatus for compensation of beam property drifts detec...

Method and apparatus for wavelength calibration

Resonator for single line selection

Excimer or molecular fluorine laser having lengthened electrodes

Line-narrowing module for high power laser

Discharge unit for a high repetition rate excimer or molecular fluo...

Molecular fluorine laser with spectral linewidth of less than 1 pm

Laser beam monitoring apparatus and method

Patents Applicationslast 30 patents

Radiation Source

LITHOGRAPHIC APPARATUS, EUV RADIATION GENERATION APPARATUS AND DEVI...

Method and Device for Producing Extreme Ultraviolet Radiation or So...

Laser gas replenishment method

Laser gas replenishment method

Radiation source with high average EUV radiation output

Radiation source for generating extreme ultraviolet radiation

Absolute wavelength calibration of lithography laser using multiple...

Arrangement for monitoring the energy radiated by an EUV radiation...

Very narrow band excimer or molecular fluorine laser

Molecular fluorine laser with spectral linewidth of less than 1 pm

Molecular fluorine laser with spectral linewidth of less than 1 pm

Line-narrowing module for high power laser

Wavelength and bandwidth monitor for excimer or molecular fluorine...

Electrical excitation circuit for a pulsed gas laser

Tunable laser with stabilized grating

Method and apparatus for wavelength calibration

Excimer or molecular fluorine laser having lengthened electrodes

Discharge unit for a high repetition rate excimer or molecular fluo...

Method and apparatus for compensation of beam property drifts detec...

Detector with frequency converting coating

Preionization arrangement for a gas laser

Discharge unit for a high repetition rate excimer or molecular fluo...

Discharge unit for a high repetition rate excimer or molecular fluo...