Uwe Bruno Heini Stamm

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Goettingen, DE

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Patents Applicationslast 30 patents

Information Patent Application
SOURCE COLLECTOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING M...
- Publication number 20120182536
- Publication date Jul 19, 2012
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV RADIATION GENERATION APPARATUS
- Publication number 20110026002
- Publication date Feb 3, 2011
- ASML NETHERLANDS B.V.
- Erik Roelof LOOPSTRA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
RADIATION SYSTEM AND LITHOGRAPHIC APPARATUS
- Publication number 20110013166
- Publication date Jan 20, 2011
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR