Uwe Czarnetzki

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Bochum, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for controlling ion energy in radio frequency plasmas
- Patent number 8,933,629
- Issue date Jan 13, 2015
- Ruhr-Universität Bochum
- Brian George Heil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for controlling ion energy in radio frequency plasmas
- Patent number 8,643,280
- Issue date Feb 4, 2014
- Ruhr-Universität Bochum
- Brian George Heil
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR CONTROLLING ION ENERGY IN RADIO FREQUENCY PLASMAS
- Publication number 20140103808
- Publication date Apr 17, 2014
- RUHR-UNIVERSITÄT BOCHUM
- Brian George Heil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR PLASMA TREATMENT OF A FLAT SUBSTRATE
- Publication number 20120097641
- Publication date Apr 26, 2012
- FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGWANDTEN FORSCHUNG E.V.
- Rudolf Beckmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CONTROLLING ION ENERGY IN RADIO FREQUENCY PLASMAS
- Publication number 20110248634
- Publication date Oct 13, 2011
- RUHR-UNIVERSITAT
- Brian George Heil
- H01 - BASIC ELECTRIC ELEMENTS