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Uwe Dietze
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Austin, TX, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method for treating substrates with an aqueous liquid medium expose...
Patent number
11,358,172
Issue date
Jun 14, 2022
SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO. KG
Davide Dattilo
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Device for applying a liquid medium which is exposed to UV radiatio...
Patent number
11,130,158
Issue date
Sep 28, 2021
SUSS MICRO TEC PHOTOMASK EQUIPMENT GMBH & CO KG
Peter Dress
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for cleaning a substrate and computer program...
Patent number
10,898,932
Issue date
Jan 26, 2021
SUSS MICRO TEC PHOTOMASK EQUIPMENT GMBH & CO KG
Uwe Dietze
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Holder for holding and for protecting a side of a photomask or a ph...
Patent number
10,845,718
Issue date
Nov 24, 2020
SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO. KG
Jens Krümberg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device for applying a liquid medium which is exposed to UV radiatio...
Patent number
10,843,235
Issue date
Nov 24, 2020
SUSS MICRO TEC PHOTOMASK EQUIPMENT GMBH & CO KG
Jörg Duda
B08 - CLEANING
Information
Patent Grant
Treatment head, treatment system and method for treating a local su...
Patent number
10,722,925
Issue date
Jul 28, 2020
SUSS MICRO TEC PHOTOMASK EQUIPMENT GMBH & CO KG
Uwe Dietze
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for cleaning a partial area of a substrate
Patent number
10,416,575
Issue date
Sep 17, 2019
SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO. KG
Davide Dattilo
B08 - CLEANING
Information
Patent Grant
Method and apparatus for treating substrates
Patent number
10,265,739
Issue date
Apr 23, 2019
SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO. KG
Uwe Dietze
B08 - CLEANING
Information
Patent Grant
Method and apparatus for treating substrates
Patent number
9,662,684
Issue date
May 30, 2017
Suss Microtec Photomask Equipment GmbH & Co. KG
Uwe Dietze
B08 - CLEANING
Information
Patent Grant
Method for thermally treating substrates
Patent number
6,919,538
Issue date
Jul 19, 2005
STEAG HamaTech AG
Jakob Szekeresch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for the treatment of substrates
Patent number
6,512,207
Issue date
Jan 28, 2003
STEAG HamaTech AG
Peter Dress
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
HOLDER FOR HOLDING AND FOR PROTECTING A SIDE OF A PHOTOMASK OR A PH...
Publication number
20190369510
Publication date
Dec 5, 2019
SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO. KG
Jens Krümberg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR CLEANING A SUBSTRATE AND COMPUTER PROGRAM...
Publication number
20190247896
Publication date
Aug 15, 2019
SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO. KG
Uwe Dietze
B08 - CLEANING
Information
Patent Application
TREATMENT HEAD, TREATMENT SYSTEM AND METHOD FOR TREATING A LOCAL SU...
Publication number
20190168269
Publication date
Jun 6, 2019
SUSS MIRCROTEC PHOTOMASK EQUIPMENT GMBH & CO. KG
Uwe Dietze
B08 - CLEANING
Information
Patent Application
DEVICE FOR APPLYING A LIQUID MEDIUM WHICH IS EXPOSED TO UV RADIATIO...
Publication number
20180243802
Publication date
Aug 30, 2018
SUSS Micro Tec Photomask Equipment GmbH & Co. KG
Peter Dress
B08 - CLEANING
Information
Patent Application
DEVICE FOR APPLYING A LIQUID MEDIUM WHICH IS EXPOSED TO UV RADIATIO...
Publication number
20180236501
Publication date
Aug 23, 2018
SUSS Micro Tec Photomask Equipment GmbH & Co. KG
Jörg Duda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR CLEANING A PARTIAL AREA OF A SUBSTRATE
Publication number
20180136573
Publication date
May 17, 2018
SUSS MIRCROTEC PHOTOMASK EQUIPMENT GMBH & CO, KG
Davide Dattilo
B08 - CLEANING
Information
Patent Application
METHOD AND APPARATUS FOR TREATING SUBSTRATES
Publication number
20170320108
Publication date
Nov 9, 2017
HamaTech APE GmbH & Co. KG
Uwe Dietze
B08 - CLEANING
Information
Patent Application
METHOD AND AN APPARATUS FOR CLEANING SUBSTRATES
Publication number
20170271145
Publication date
Sep 21, 2017
SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO. KG
Uwe Dietze
B08 - CLEANING
Information
Patent Application
METHOD AND APPARATUS FOR TREATING SUBSTRATES
Publication number
20170252781
Publication date
Sep 7, 2017
SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO. KG
Uwe Dietze
B08 - CLEANING
Information
Patent Application
METHOD FOR TREATING SUBSTRATES WITH AN AQUEOUS LIQUID MEDIUM EXPOSE...
Publication number
20170087585
Publication date
Mar 30, 2017
SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO. KG
Davide Dattilo
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
METHOD AND APPARATUS FOR TREATING SUBSTRATES
Publication number
20120211024
Publication date
Aug 23, 2012
HamaTech APE GmbH & Co. KG
Uwe Dietze
B08 - CLEANING