Uwe HEMPELMANN

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Projection exposure apparatus and method for measuring a projection...
- Patent number 10,585,356
- Issue date Mar 10, 2020
- Carl Zeiss SMT GmbH
- Eugen Foca
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Arrangement for and method of characterising the polarization prope...
- Patent number 9,274,440
- Issue date Mar 1, 2016
- Carl Zeiss SMT GmbH
- Uwe Hempelmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION EXPOSURE APPARATUS AND METHOD FOR MEASURING A PROJECTION...
- Publication number 20180373163
- Publication date Dec 27, 2018
- Carl Zeiss SMT GMBH
- Eugen FOCA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ARRANGEMENT FOR AND METHOD OF CHARACTERISING THE POLARISATION PROPE...
- Publication number 20130021592
- Publication date Jan 24, 2013
- Carl Zeiss SMT GMBH
- Uwe HEMPELMANN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY