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Uwe Lang
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Oberkochen, DE
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last 30 patents
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Patent Grant
Multi-beam particle microscope and method for operating same
Patent number
9,536,702
Issue date
Jan 3, 2017
Carl Zeiss Microscopy GmbH
Uwe Lang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
MULTI-BEAM PARTICLE MICROSCOPE AND METHOD FOR OPERATING SAME
Publication number
20150348749
Publication date
Dec 3, 2015
CARL ZEISS MICROSCOPY GMBH
Uwe Lang
H01 - BASIC ELECTRIC ELEMENTS