Uwe Leinhos

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Gottingen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Internal wavelength calibration for tunable ArF-excimer laser using...
- Patent number 6,404,795
- Issue date Jun 11, 2002
- Lambda Physik AG
- Uwe Leinhos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical pulse stretching and smoothing for ArF and F2 lithography e...
- Patent number 6,389,045
- Issue date May 14, 2002
- Lambda Physik AG
- Klaus Mann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detector with frequency converting coating
- Patent number 6,389,048
- Issue date May 14, 2002
- Lambda Physik AG
- Uwe Stamm
- G01 - MEASURING TESTING
Information Patent Grant
Detector with frequency converting coating
- Patent number 6,327,284
- Issue date Dec 4, 2001
- Lambda Physik AG
- Uwe Stamm
- G01 - MEASURING TESTING
Information Patent Grant
Internal wavelength calibration for tunable ArF-excimer laser using...
- Patent number 6,269,110
- Issue date Jul 31, 2001
- Lambda Physik AG
- Uwe Leinhos
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Detector with frequency converting coating
- Publication number 20010040905
- Publication date Nov 15, 2001
- Lambda Physik AG
- Uwe Stamm
- G01 - MEASURING TESTING