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Uwe Liebold
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Kleinroehrsdorf, DE
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Patents Grants
last 30 patents
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Patent Grant
Method of providing context specific recipes in a semiconductor fac...
Patent number
7,962,459
Issue date
Jun 14, 2011
GLOBALFOUNDRIES Inc.
Kay Hellig
G05 - CONTROLLING REGULATING
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Patent Grant
Method and system for handling substrates in a production line incl...
Patent number
7,130,762
Issue date
Oct 31, 2006
Advanced Micro Devices, Inc.
Kay Hellig
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Patents Applications
last 30 patents
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Patent Application
Method of providing context specific recipes in a semiconductor fac...
Publication number
20040220968
Publication date
Nov 4, 2004
Kay Hellig
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
Method and system for handling substrates in a production line incl...
Publication number
20040044435
Publication date
Mar 4, 2004
Kay Hellig
G05 - CONTROLLING REGULATING