Uwe MICKAN

Person

Veldhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,146,142
- Issue date Dec 4, 2018
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,606,448
- Issue date Mar 28, 2017
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,442,388
- Issue date Sep 13, 2016
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Actuator system, lithographic apparatus, method of controlling the...
- Patent number 8,634,062
- Issue date Jan 21, 2014
- ASML Netherlands B.V.
- Gosse Charles De Vries
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,208,123
- Issue date Jun 26, 2012
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of generating a photolithography patterning device, computer...
- Patent number 7,960,074
- Issue date Jun 14, 2011
- ASML Netherlands B.V.
- Uwe Mickan
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and exposure apparatus for performing a tilted focus and a d...
- Patent number 7,834,975
- Issue date Nov 16, 2010
- ASML Netherlands B.V.
- Jacobus Burghoorn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical apparatus
- Patent number 7,817,246
- Issue date Oct 19, 2010
- ASML Netherlands B.V.
- Uwe Mickan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and patterning device
- Patent number 7,713,665
- Issue date May 11, 2010
- ASML Netherlands B.V.
- Uwe Mickan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, a tilting device method for performing a tilted...
- Patent number 7,518,706
- Issue date Apr 14, 2009
- ASML Netherlands B.V.
- Jan Hauschild
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for electrically connecting a mask to earth, a mask
- Patent number 7,514,186
- Issue date Apr 7, 2009
- ASML Netherlands B.V.
- Hendricus Johannes Maria Meijer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Lithographic system, method for adapting transmission characteristi...
- Patent number 7,369,216
- Issue date May 6, 2008
- ASML Netherlands B.V.
- Johannes Hubertus Josephina Moors
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,177,010
- Issue date Feb 13, 2007
- ASML Netherlands B.V.
- Hans Van Der Laan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method and variable at...
- Patent number 7,145,640
- Issue date Dec 5, 2006
- ASML Netherlands B.V.
- Harm-Jan Voorma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus with autofocus system
- Patent number 7,136,149
- Issue date Nov 14, 2006
- ASML Netherlands B.V.
- Uwe Mickan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
- Patent number 7,098,994
- Issue date Aug 29, 2006
- ASML Netherlands B.V.
- Johannes Hubertus Josephina Moors
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Calibration apparatus and method of calibrating a radiation sensor...
- Patent number 7,092,072
- Issue date Aug 15, 2006
- ASML Netherlands B.V.
- Johannes Hubertus Josephina Moors
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device manufacturing method and computer program
- Patent number 7,042,550
- Issue date May 9, 2006
- ASML Netherlands B.V.
- Martin Lowisch
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 6,980,281
- Issue date Dec 27, 2005
- ASML Netherlands B.V.
- Johannes Hubertus Josephina Moors
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20190086819
- Publication date Mar 21, 2019
- ASML NETHERLANDS B.V.
- Erik Roelof LOOPSTRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170160650
- Publication date Jun 8, 2017
- ASML NETHERLANDS B.V.
- Erik Roelof LOOPSTRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140347642
- Publication date Nov 27, 2014
- ASML NETHERLANDS B.V.
- Erik Roelof LOOPSTRA
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140071420
- Publication date Mar 13, 2014
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
ILLUMINATION SYSTEM, LITHOGRAPHIC APPARATUS AND ILLUMINATION METHOD
- Publication number 20120262690
- Publication date Oct 18, 2012
- ASML NETHERLANDS B.V.
- Wilhelmus Petrus De Boeij
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC METHOD AND APPARATUS
- Publication number 20110310369
- Publication date Dec 22, 2011
- ASML NETHERLANDS B.V.
- Uwe MICKAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Actuator System, Lithographic Apparatus, Method of Controlling the...
- Publication number 20100149506
- Publication date Jun 17, 2010
- ASML NETHERLANDS B.V.
- Gosse Charles DE VRIES
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical apparatus
- Publication number 20070296943
- Publication date Dec 27, 2007
- ASML NETHERLANDS B.V.
- Uwe Mickan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and patterning device
- Publication number 20070231709
- Publication date Oct 4, 2007
- ASML NETHERLANDS B.V.
- Uwe Mickan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System for electrically connecting a mask to earth, a mask
- Publication number 20060292457
- Publication date Dec 28, 2006
- ASML NETHERLANDS B.V.
- Hendricus Johannes Maria Meijer
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method and exposure apparatus for performing a tilted focus and a d...
- Publication number 20060279718
- Publication date Dec 14, 2006
- ASML NETHERLANDS B.V.
- Arie Jeffrey Den Boef
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of generating a photolithography patterning device, computer...
- Publication number 20060194123
- Publication date Aug 31, 2006
- ASML NETHERLANDS B.V.
- Uwe Mickan
- B82 - NANO-TECHNOLOGY
Information Patent Application
Exposure apparatus, a tilting device method for performing a tilted...
- Publication number 20060141375
- Publication date Jun 29, 2006
- ASML NETHERLANDS B.V.
- Jan Hauschild
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus with autofocus system
- Publication number 20060132743
- Publication date Jun 22, 2006
- ASML NETHERLANDS B.V.
- Uwe Mickan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060092397
- Publication date May 4, 2006
- ASML NETHERLANDS B.V.
- Hans Van Der Laan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic system, method for adapting transmission characteristi...
- Publication number 20060082751
- Publication date Apr 20, 2006
- ASML NETHERLANDS B.V.
- Johannes Hubertus Josephina Moors
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Calibration apparatus and method of calibrating a radiation sensor...
- Publication number 20060001856
- Publication date Jan 5, 2006
- ASML NETHERLANDS B.V.
- Johannes Hubertus Josephina Moors
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method and variable at...
- Publication number 20050206869
- Publication date Sep 22, 2005
- ASML NETHERLANDS B.V.
- Harm-Jan Voorma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20050162629
- Publication date Jul 28, 2005
- ASML NETHERLANDS B.V.
- Johannes Hubertus Josephina Moors
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method, and device man...
- Publication number 20050157284
- Publication date Jul 21, 2005
- ASML NETHERLANDS B.V.
- Johannes Hubertus Josephina Moors
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method for exposing a substrate, patterning device, and lithographi...
- Publication number 20050134820
- Publication date Jun 23, 2005
- ASML NETHERLANDS B.V.
- Heine Melle Mulder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20050094119
- Publication date May 5, 2005
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device manufacturing method and computer program
- Publication number 20040137677
- Publication date Jul 15, 2004
- ASML NETHERLANDS B.V.
- Martin Lowisch
- B82 - NANO-TECHNOLOGY

Person

Patents Grantslast 30 patents

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Actuator system, lithographic apparatus, method of controlling the...

Lithographic apparatus and device manufacturing method

Method of generating a photolithography patterning device, computer...

Method and exposure apparatus for performing a tilted focus and a d...

Optical apparatus

Lithographic apparatus and patterning device

Exposure apparatus, a tilting device method for performing a tilted...

System for electrically connecting a mask to earth, a mask

Lithographic system, method for adapting transmission characteristi...

Lithographic apparatus and device manufacturing method

Lithographic apparatus, device manufacturing method and variable at...

Lithographic apparatus with autofocus system

Lithographic apparatus, device manufacturing method, and device man...

Calibration apparatus and method of calibrating a radiation sensor...

Device manufacturing method and computer program

Lithographic apparatus and device manufacturing method

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

ILLUMINATION SYSTEM, LITHOGRAPHIC APPARATUS AND ILLUMINATION METHOD

LITHOGRAPHIC METHOD AND APPARATUS

Actuator System, Lithographic Apparatus, Method of Controlling the...

Optical apparatus

Lithographic apparatus and patterning device

System for electrically connecting a mask to earth, a mask

Method and exposure apparatus for performing a tilted focus and a d...

Method of generating a photolithography patterning device, computer...

Exposure apparatus, a tilting device method for performing a tilted...

Lithographic apparatus with autofocus system

Lithographic apparatus and device manufacturing method

Lithographic system, method for adapting transmission characteristi...

Calibration apparatus and method of calibrating a radiation sensor...

Lithographic apparatus, device manufacturing method and variable at...

Lithographic apparatus and device manufacturing method

Lithographic apparatus, device manufacturing method, and device man...

Method for exposing a substrate, patterning device, and lithographi...

Lithographic apparatus and device manufacturing method

Device manufacturing method and computer program