Uwe Müller

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Dresden, DE

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Patents Grantslast 30 patents

Information Patent Grant
Device and method for the treatment of semiconductor wafers
- Patent number 6,706,121
- Issue date Mar 16, 2004
- Mattson Wet Products
- Manfred Schenkl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bellows-type dispensing pump
- Patent number 6,360,921
- Issue date Mar 26, 2002
- STEAG MicroTech GmbH
- Robert Boos
- B67 - OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS LIQUID...

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and method for the treatment of semiconductor wafers
- Publication number 20040134522
- Publication date Jul 15, 2004
- Mattson Wet Products
- Manfred Schenkl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device and method for treating semiconductor wafers
- Publication number 20030098043
- Publication date May 29, 2003
- Manfred Schenkl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device for treating substrates
- Publication number 20030029480
- Publication date Feb 13, 2003
- Wolfgang Marschner
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...