Uwe Schulze

Person

Dresden, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for advanced process control in an etch system by...
- Patent number 8,888,947
- Issue date Nov 18, 2014
- Advanced Micro Devices, Inc.
- Matthias Schaller
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and apparatus for dispatching workpieces to tools based on p...
- Patent number 8,155,770
- Issue date Apr 10, 2012
- GLOBALFOUNDRIES Inc.
- Robert Barlovic
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and system for reducing overlay errors in semiconductor volu...
- Patent number 8,039,181
- Issue date Oct 18, 2011
- Advanced Micro Devices, Inc.
- Rolf Seltmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for reducing overlay errors within exposure field...
- Patent number 7,842,442
- Issue date Nov 30, 2010
- Advanced Micro Devices, Inc.
- Rolf Seltmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for advanced process control in an etch system by...
- Patent number 7,704,889
- Issue date Apr 27, 2010
- Advanced Micro Devices, Inc.
- Matthias Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for automatically detecting exposed substrates ha...
- Patent number 7,618,755
- Issue date Nov 17, 2009
- Advanced Micro Devices, Inc.
- Uwe Schulze
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Advanced process control model incorporating a target offset term
- Patent number 7,547,561
- Issue date Jun 16, 2009
- Advanced Micro Devices, Inc.
- Uwe Schulze
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Time weighted moving average filter
- Patent number 7,542,880
- Issue date Jun 2, 2009
- Advanced Micro Devices, Inc.
- Richard P. Good
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and system for advanced process control including tool depen...
- Patent number 7,403,832
- Issue date Jul 22, 2008
- Advanced Micro Devices, Inc.
- Uwe Schulze
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and system for estimating a state of an uninitialized advanc...
- Patent number 7,233,835
- Issue date Jun 19, 2007
- Advanced Micro Devices, Inc.
- Richard Paul Good
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method of process control
- Patent number 7,200,455
- Issue date Apr 3, 2007
- Advanced Micro Devices, Inc.
- Uwe Schulze
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and system for improving exposure uniformity in a step and r...
- Patent number 7,006,195
- Issue date Feb 28, 2006
- Advanced Micro Devices, Inc.
- Jan Raebiger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for improving the efficiency of a mechanical alig...
- Patent number 6,946,411
- Issue date Sep 20, 2005
- Advanced Micro Devices, Inc.
- Uwe Knappe
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR DISPATCHING WORKPIECES TO TOOLS BASED ON P...
- Publication number 20100249967
- Publication date Sep 30, 2010
- Robert Barlovic
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND SYSTEM FOR ADVANCED PROCESS CONTROL IN AN ETCH SYSTEM BY...
- Publication number 20100161103
- Publication date Jun 24, 2010
- Advanced Micro Devices, Inc.
- Matthias SCHALLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR REDUCING OVERLAY ERRORS IN SEMICONDUCTOR VOLU...
- Publication number 20100028790
- Publication date Feb 4, 2010
- Rolf Seltmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR REDUCING OVERLAY ERRORS WITHIN EXPOSURE FIELD...
- Publication number 20080057418
- Publication date Mar 6, 2008
- Rolf Seltmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TIME WEIGHTED MOVING AVERAGE FILTER
- Publication number 20070239285
- Publication date Oct 11, 2007
- Richard P. Good
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND SYSTEM FOR ADVANCED PROCESS CONTROL IN AN ETCH SYSTEM BY...
- Publication number 20070178699
- Publication date Aug 2, 2007
- Matthias Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR AUTOMATICALLY DETECTING EXPOSED SUBSTRATES HA...
- Publication number 20070048635
- Publication date Mar 1, 2007
- UWE SCHULZE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR ESTIMATING A STATE OF AN UNINITIALIZED ADVANC...
- Publication number 20070027568
- Publication date Feb 1, 2007
- Richard Paul Good
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND SYSTEM FOR ADVANCED PROCESS CONTROL INCLUDING TOOL DEPEN...
- Publication number 20060271225
- Publication date Nov 30, 2006
- Uwe Schulze
- G05 - CONTROLLING REGULATING
Information Patent Application
Advanced process control model incorporating a target offset term
- Publication number 20060223203
- Publication date Oct 5, 2006
- Uwe Schulze
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of process control
- Publication number 20060195211
- Publication date Aug 31, 2006
- Uwe Schulze
- G05 - CONTROLLING REGULATING
Information Patent Application
Method and system for improving exposure uniformity in a step and r...
- Publication number 20040165164
- Publication date Aug 26, 2004
- Jan Raebiger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system for improving the efficiency of a mechanical alig...
- Publication number 20040167640
- Publication date Aug 26, 2004
- Uwe Knappe
- G05 - CONTROLLING REGULATING

Uwe Schulze

Person

Patents Grantslast 30 patents

Method and system for advanced process control in an etch system by...

Method and apparatus for dispatching workpieces to tools based on p...

Method and system for reducing overlay errors in semiconductor volu...

Method and system for reducing overlay errors within exposure field...

Method and system for advanced process control in an etch system by...

Method and system for automatically detecting exposed substrates ha...

Advanced process control model incorporating a target offset term

Time weighted moving average filter

Method and system for advanced process control including tool depen...

Method and system for estimating a state of an uninitialized advanc...

Method of process control

Method and system for improving exposure uniformity in a step and r...

Method and system for improving the efficiency of a mechanical alig...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR DISPATCHING WORKPIECES TO TOOLS BASED ON P...

METHOD AND SYSTEM FOR ADVANCED PROCESS CONTROL IN AN ETCH SYSTEM BY...

METHOD AND SYSTEM FOR REDUCING OVERLAY ERRORS IN SEMICONDUCTOR VOLU...

METHOD AND SYSTEM FOR REDUCING OVERLAY ERRORS WITHIN EXPOSURE FIELD...

TIME WEIGHTED MOVING AVERAGE FILTER

METHOD AND SYSTEM FOR ADVANCED PROCESS CONTROL IN AN ETCH SYSTEM BY...

METHOD AND SYSTEM FOR AUTOMATICALLY DETECTING EXPOSED SUBSTRATES HA...

METHOD AND SYSTEM FOR ESTIMATING A STATE OF AN UNINITIALIZED ADVANC...

METHOD AND SYSTEM FOR ADVANCED PROCESS CONTROL INCLUDING TOOL DEPEN...

Advanced process control model incorporating a target offset term

Method of process control

Method and system for improving exposure uniformity in a step and r...

Method and system for improving the efficiency of a mechanical alig...