Vadim Boguslavskiy

Person

Princeton, NJ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Terminal for mechanical support of a heating element
- Patent number 10,136,472
- Issue date Nov 20, 2018
- Plansee SE
- Arno Plankensteiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing methods and apparatus with temperature distribution control
- Patent number 10,002,805
- Issue date Jun 19, 2018
- Veeco Instruments Inc.
- Alexander I. Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Keyed wafer carrier
- Patent number 9,816,184
- Issue date Nov 14, 2017
- Veeco Instruments Inc.
- Sandeep Krishnan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Supporting system for a heating element and heating system
- Patent number 9,719,629
- Issue date Aug 1, 2017
- Plansee SE
- Vadim Boguslavskiy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heated wafer carrier profiling
- Patent number 9,653,340
- Issue date May 16, 2017
- Veeco Instruments Inc.
- Vadim Boguslavskiy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Supporting system for a heating element and heating system
- Patent number 9,497,803
- Issue date Nov 15, 2016
- Plansee SE
- Vadim Boguslavskiy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing methods and apparatus with temperature distribution control
- Patent number 9,324,590
- Issue date Apr 26, 2016
- Veeco Instruments Inc.
- Alex Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Keyed spindle
- Patent number D748591
- Issue date Feb 2, 2016
- Veeco Instruments Inc.
- Sandeep Krishnan
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Spindle key
- Patent number D744967
- Issue date Dec 8, 2015
- Veeco Instruments Inc.
- Sandeep Krishnan
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Keyed spindle
- Patent number D726133
- Issue date Apr 7, 2015
- Veeco Instruments Inc.
- Sandeep Krishnan
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Heated wafer carrier profiling
- Patent number 8,958,061
- Issue date Feb 17, 2015
- Veeco Instruments Inc.
- Vadim Boguslavskiy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for in-situ pyrometer calibration
- Patent number 8,888,360
- Issue date Nov 18, 2014
- Veeco Instruments Inc.
- Alexander I. Gurary
- G01 - MEASURING TESTING
Information Patent Grant
Spindle key
- Patent number D712852
- Issue date Sep 9, 2014
- Veeco Instruments Inc.
- Sandeep Krishnan
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Multi-keyed spindle
- Patent number D711332
- Issue date Aug 19, 2014
- Veeco Instruments Inc.
- Sandeep Krishnan
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Keyed wafer carrier
- Patent number D687790
- Issue date Aug 13, 2013
- Veeco Instruments Inc.
- Sandeep Krishnan
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Multi-keyed wafer carrier
- Patent number D687791
- Issue date Aug 13, 2013
- Veeco Instruments Inc.
- Sandeep Krishnan
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Wafer processing method with carrier hub removal
- Patent number 8,231,940
- Issue date Jul 31, 2012
- Veeco Instruments Inc.
- Vadim Boguslavskiy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer carrier with hub
- Patent number 8,021,487
- Issue date Sep 20, 2011
- Veeco Instruments Inc.
- Vadim Boguslavskiy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for increasing the emissivity of a material
- Patent number 7,666,323
- Issue date Feb 23, 2010
- Veeco Instruments Inc.
- Vadim Boguslavskiy
- C21 - METALLURGY OF IRON
Information Patent Grant
Reactor having a movable shutter
- Patent number 7,276,124
- Issue date Oct 2, 2007
- Veeco Instruments Inc.
- Alex Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer carrier for growing GaN wafers
- Patent number 7,235,139
- Issue date Jun 26, 2007
- Veeco Instruments Inc.
- Vadim Boguslavskiy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactor having a movable shutter
- Patent number 6,902,623
- Issue date Jun 7, 2005
- Veeco Instruments Inc.
- Alexander Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptorless reactor for growing epitaxial layers on wafers by che...
- Patent number 6,726,769
- Issue date Apr 27, 2004
- Emcore Corporation
- Vadim Boguslavskiy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptorless reactor for growing epitaxial layers on wafers by che...
- Patent number 6,685,774
- Issue date Feb 3, 2004
- Emcore Corporation
- Vadim Boguslavskiy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptorless reactor for growing epitaxial layers on wafers by che...
- Patent number 6,506,252
- Issue date Jan 14, 2003
- Emcore Corporation
- Vadim Boguslavskiy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for controlling temperature uniformity of subs...
- Patent number 6,492,625
- Issue date Dec 10, 2002
- Emcore Corporation
- Vadim Boguslavskiy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature determination using pyrometry
- Patent number 6,398,406
- Issue date Jun 4, 2002
- Sandia Corporation
- William G. Breiland
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring the temperature of objects on a...
- Patent number 6,349,270
- Issue date Feb 19, 2002
- Emcore Corporation
- Alexander Gurary
- G05 - CONTROLLING REGULATING
Information Patent Grant
Wafer carrier with flexible wafer flat holder
- Patent number 5,840,124
- Issue date Nov 24, 1998
- Emcore Corporation
- Alexander I. Gurary
- C30 - CRYSTAL GROWTH
Information Patent Grant
CVD reactor for uniform heating with radiant heating filaments
- Patent number 5,759,281
- Issue date Jun 2, 1998
- Emcore Corporation
- Alexander I. Gurary
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
ORGANIC VAPOR JET PRINTING SYSTEM
- Publication number 20230363244
- Publication date Nov 9, 2023
- UNIVERSAL DISPLAY CORPORATION
- Steven Shigeki AOCHI
Information Patent Application
KEYED WAFER CARRIER
- Publication number 20170191157
- Publication date Jul 6, 2017
- VEECO INSTRUMENTS INC.
- Sandeep Krishnan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING METHODS AND APPARATUS WITH TEMPERATURE DISTRIBUTION CONTROL
- Publication number 20160204044
- Publication date Jul 14, 2016
- VEECO INSTRUMENTS INC.
- Alexander I. Gurary
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORTING SYSTEM FOR A HEATING ELEMENT AND HEATING SYSTEM
- Publication number 20150289319
- Publication date Oct 8, 2015
- PLANSEE SE
- VADIM BOGUSLAVSKIY
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUPPORTING SYSTEM FOR A HEATING ELEMENT AND HEATING SYSTEM
- Publication number 20150223291
- Publication date Aug 6, 2015
- PLANSEE USA LLC
- VADIM BOGUSLAVSKIY
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TERMINAL FOR MECHANICAL SUPPORT OF A HEATING ELEMENT
- Publication number 20140042147
- Publication date Feb 13, 2014
- VEECO INSTRUMENTS INC.
- ARNO PLANKENSTEINER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AUTOMATED PROCESS CHAMBER CLEANING IN MATERIAL DEPOSITION SYSTEMS
- Publication number 20130298831
- Publication date Nov 14, 2013
- Bassam Shamoun
- A46 - BRUSHWARE
Information Patent Application
KEYED WAFER CARRIER
- Publication number 20130252404
- Publication date Sep 26, 2013
- VEECO INSTRUMENTS INC.
- Sandeep Krishnan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATED WAFER CARRIER PROFILING
- Publication number 20120307233
- Publication date Dec 6, 2012
- VEECO INSTRUMENTS INC.
- Vadim Boguslavskiy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATED WAFER CARRIER PROFILING
- Publication number 20120304926
- Publication date Dec 6, 2012
- VEECO INSTRUMENTS INC.
- Vadim Boguslavskiy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR IN-SITU PYROMETER CALIBRATION
- Publication number 20120170609
- Publication date Jul 5, 2012
- VEECO INSTRUMENTS INC.
- Alexander I. Gurary
- G01 - MEASURING TESTING
Information Patent Application
WAFER CARRIER WITH HUB
- Publication number 20110287635
- Publication date Nov 24, 2011
- VEECO INSTRUMENTS INC.
- Vadim Boguslavskiy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING METHODS AND APPARATUS WITH TEMPERATURE DISTRIBUTION CONTROL
- Publication number 20110206843
- Publication date Aug 25, 2011
- VEECO INSTRUMENTS INC.
- Alex Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER CARRIER WITH HUB
- Publication number 20110114022
- Publication date May 19, 2011
- VEECO INSTRUMENTS INC.
- Vadim Boguslavskiy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Wafer carrier with hub
- Publication number 20090155028
- Publication date Jun 18, 2009
- Veeco Instruments Inc.
- Vadim Boguslavskiy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System and method for increasing the emissivity of a material
- Publication number 20050274374
- Publication date Dec 15, 2005
- Veeco Instruments Inc.
- Vadim Boguslavskiy
- C21 - METALLURGY OF IRON
Information Patent Application
Reactor having a movable shutter
- Publication number 20050217578
- Publication date Oct 6, 2005
- Alexander Gurary
- C30 - CRYSTAL GROWTH
Information Patent Application
Wafer carrier for growing GaN wafers
- Publication number 20050126496
- Publication date Jun 16, 2005
- Vadim Boguslavskiy
- C30 - CRYSTAL GROWTH
Information Patent Application
Susceptorless reactor for growing epitaxial layers on wafers by che...
- Publication number 20030111009
- Publication date Jun 19, 2003
- Emcore Corporation
- Vadim Boguslavskiy
- C30 - CRYSTAL GROWTH
Information Patent Application
Susceptorless reactor for growing epitaxial layers on wafers by che...
- Publication number 20030047132
- Publication date Mar 13, 2003
- Emcore Corporation
- Vadim Boguslavskiy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reactor having a movable shutter
- Publication number 20020185068
- Publication date Dec 12, 2002
- Alexander Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Susceptorless reactor for growing epitaxial layers on wafers by che...
- Publication number 20020106826
- Publication date Aug 8, 2002
- Vadim Boguslavskiy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Vadim Boguslavskiy

Person

Patents Grantslast 30 patents

Terminal for mechanical support of a heating element

Processing methods and apparatus with temperature distribution control

Keyed wafer carrier

Supporting system for a heating element and heating system

Heated wafer carrier profiling

Supporting system for a heating element and heating system

Processing methods and apparatus with temperature distribution control

Keyed spindle

Spindle key

Keyed spindle

Heated wafer carrier profiling

Methods and systems for in-situ pyrometer calibration

Spindle key

Multi-keyed spindle

Keyed wafer carrier

Multi-keyed wafer carrier

Wafer processing method with carrier hub removal

Wafer carrier with hub

System and method for increasing the emissivity of a material

Reactor having a movable shutter

Wafer carrier for growing GaN wafers

Reactor having a movable shutter

Susceptorless reactor for growing epitaxial layers on wafers by che...

Susceptorless reactor for growing epitaxial layers on wafers by che...

Susceptorless reactor for growing epitaxial layers on wafers by che...

Apparatus and method for controlling temperature uniformity of subs...

Temperature determination using pyrometry

Method and apparatus for measuring the temperature of objects on a...

Wafer carrier with flexible wafer flat holder

CVD reactor for uniform heating with radiant heating filaments

Patents Applicationslast 30 patents

ORGANIC VAPOR JET PRINTING SYSTEM

KEYED WAFER CARRIER

PROCESSING METHODS AND APPARATUS WITH TEMPERATURE DISTRIBUTION CONTROL

SUPPORTING SYSTEM FOR A HEATING ELEMENT AND HEATING SYSTEM

SUPPORTING SYSTEM FOR A HEATING ELEMENT AND HEATING SYSTEM

TERMINAL FOR MECHANICAL SUPPORT OF A HEATING ELEMENT

AUTOMATED PROCESS CHAMBER CLEANING IN MATERIAL DEPOSITION SYSTEMS

KEYED WAFER CARRIER

HEATED WAFER CARRIER PROFILING

HEATED WAFER CARRIER PROFILING

METHODS AND SYSTEMS FOR IN-SITU PYROMETER CALIBRATION

WAFER CARRIER WITH HUB

PROCESSING METHODS AND APPARATUS WITH TEMPERATURE DISTRIBUTION CONTROL

WAFER CARRIER WITH HUB

Wafer carrier with hub

System and method for increasing the emissivity of a material

Reactor having a movable shutter

Wafer carrier for growing GaN wafers

Susceptorless reactor for growing epitaxial layers on wafers by che...

Susceptorless reactor for growing epitaxial layers on wafers by che...

Reactor having a movable shutter

Susceptorless reactor for growing epitaxial layers on wafers by che...