Vahan A. Senekerimyan

Person

San Diego, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for calibrating variable focal length lens system...
- Patent number 11,125,967
- Issue date Sep 21, 2021
- Mitutoyo Corporation
- Paul Gerard Gladnick
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
High-speed tag lens assisted 3D metrology and extended depth-of-fie...
- Patent number 10,812,701
- Issue date Oct 20, 2020
- Mitutoyo Corporation
- Vahan Senekerimyan
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Determining moving properties of a target in an extreme ultraviolet...
- Patent number 10,794,683
- Issue date Oct 6, 2020
- ASML Netherlands B.V.
- Jesse Quinn Odle
- G01 - MEASURING TESTING
Information Patent Grant
Determining moving properties of a target in an extreme ultraviolet...
- Patent number 10,605,588
- Issue date Mar 31, 2020
- ASML Netherlands B.V.
- Jesse Quinn Odle
- G01 - MEASURING TESTING
Information Patent Grant
Determining moving properties of a target in an extreme ultraviolet...
- Patent number 10,429,173
- Issue date Oct 1, 2019
- ASML Netherlands B.V.
- Jesse Quinn Odle
- G01 - MEASURING TESTING
Information Patent Grant
Method of improving measurement of energy of extreme ultraviolet ra...
- Patent number 10,210,963
- Issue date Feb 19, 2019
- ASML Netherlands B.V.
- Vahan A. Senekerimyan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Determining moving properties of a target in an extreme ultraviolet...
- Patent number 9,778,022
- Issue date Oct 3, 2017
- ASML Netherlands B.V.
- Jesse Quinn Odle
- G01 - MEASURING TESTING
Information Patent Grant
Minimizing grazing incidence reflections for reliable EUV power mea...
- Patent number 9,546,901
- Issue date Jan 17, 2017
- ASML Netherlands B.V.
- Vahan A. Senekerimyan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Viewport protector for an extreme ultraviolet light source
- Patent number 9,341,752
- Issue date May 17, 2016
- ASML Netherlands B.V.
- Vahan Senekerimyan
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
System and method for controlling droplet timing in an LPP EUV ligh...
- Patent number 9,241,395
- Issue date Jan 19, 2016
- ASML Netherlands B.V.
- Vahan Senekerimyan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for controlling droplet timing and steering in an...
- Patent number 8,809,823
- Issue date Aug 19, 2014
- ASML Netherlands B.V.
- Vahan Senekerimyan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Metrology for extreme ultraviolet light source
- Patent number 8,000,212
- Issue date Aug 16, 2011
- Cymer, Inc.
- Vahan Senekerimyan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
METROLOGY SYSTEM FOR MEASURING EDGE OF CIRCULAR WORKPIECE
- Publication number 20240219316
- Publication date Jul 4, 2024
- MITUTOYO CORPORATION
- Christopher Richard HAMNER
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR CALIBRATING VARIABLE FOCAL LENGTH LENS SYSTEM...
- Publication number 20200209519
- Publication date Jul 2, 2020
- MITUTOYO CORPORATION
- Paul Gerard Gladnick
- G02 - OPTICS
Information Patent Application
DETERMINING MOVING PROPERTIES OF A TARGET IN AN EXTREME ULTRAVIOLET...
- Publication number 20200191554
- Publication date Jun 18, 2020
- ASML NETHERLANDS B.V.
- Jesse Quinn Odle
- G01 - MEASURING TESTING
Information Patent Application
HIGH-SPEED TAG LENS ASSISTED 3D METROLOGY AND EXTENDED DEPTH-OF-FIE...
- Publication number 20200195836
- Publication date Jun 18, 2020
- MITUTOYO CORPORATION
- Vahan Senekerimyan
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
DETERMINING MOVING PROPERTIES OF A TARGET IN AN EXTREME ULTRAVIOLET...
- Publication number 20190383598
- Publication date Dec 19, 2019
- ASML NETHERLANDS B.V.
- Jesse Quinn Odle
- G01 - MEASURING TESTING
Information Patent Application
DETERMINING MOVING PROPERTIES OF A TARGET IN AN EXTREME ULTRAVIOLET...
- Publication number 20190186892
- Publication date Jun 20, 2019
- ASML NETHERLANDS B.V.
- Jesse Quinn Odle
- G01 - MEASURING TESTING
Information Patent Application
MINIMIZING GRAZING INCIDENCE REFLECTIONS FOR RELIABLE EUV POWER MEA...
- Publication number 20170084360
- Publication date Mar 23, 2017
- ASML NETHERLANDS B.V.
- Vahan A. Senekerimyan
- G01 - MEASURING TESTING
Information Patent Application
MINIMIZING GRAZING INCIDENCE REFLECTIONS FOR RELIABLE EUV POWER MEA...
- Publication number 20160054174
- Publication date Feb 25, 2016
- ASML Netherlands B.V.
- Vahan A. Senekerimyan
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Controlling Droplet Timing in an LPP EUV Ligh...
- Publication number 20150083898
- Publication date Mar 26, 2015
- Cymer, Inc.
- Vahan Senekerimyan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
VIEWPORT PROTECTOR FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
- Publication number 20140126043
- Publication date May 8, 2014
- Vahan Senekerimyan
- G02 - OPTICS
Information Patent Application
Metrology for Extreme Ultraviolet Light Source
- Publication number 20110141865
- Publication date Jun 16, 2011
- CYMER INC.
- Vahan Senekerimyan
- G01 - MEASURING TESTING

Vahan A. Senekerimyan

Person

Patents Grantslast 30 patents

System and method for calibrating variable focal length lens system...

High-speed tag lens assisted 3D metrology and extended depth-of-fie...

Determining moving properties of a target in an extreme ultraviolet...

Determining moving properties of a target in an extreme ultraviolet...

Determining moving properties of a target in an extreme ultraviolet...

Method of improving measurement of energy of extreme ultraviolet ra...

Determining moving properties of a target in an extreme ultraviolet...

Minimizing grazing incidence reflections for reliable EUV power mea...

Viewport protector for an extreme ultraviolet light source

System and method for controlling droplet timing in an LPP EUV ligh...

System and method for controlling droplet timing and steering in an...

Metrology for extreme ultraviolet light source

Patents Applicationslast 30 patents

METROLOGY SYSTEM FOR MEASURING EDGE OF CIRCULAR WORKPIECE

SYSTEM AND METHOD FOR CALIBRATING VARIABLE FOCAL LENGTH LENS SYSTEM...

DETERMINING MOVING PROPERTIES OF A TARGET IN AN EXTREME ULTRAVIOLET...

HIGH-SPEED TAG LENS ASSISTED 3D METROLOGY AND EXTENDED DEPTH-OF-FIE...

DETERMINING MOVING PROPERTIES OF A TARGET IN AN EXTREME ULTRAVIOLET...

DETERMINING MOVING PROPERTIES OF A TARGET IN AN EXTREME ULTRAVIOLET...

MINIMIZING GRAZING INCIDENCE REFLECTIONS FOR RELIABLE EUV POWER MEA...

MINIMIZING GRAZING INCIDENCE REFLECTIONS FOR RELIABLE EUV POWER MEA...

System and Method for Controlling Droplet Timing in an LPP EUV Ligh...

VIEWPORT PROTECTOR FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

Metrology for Extreme Ultraviolet Light Source