Vahid Firouzdor

Person

San Mateo, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ion beam sputtering with ion assisted deposition for coatings on ch...
- Patent number 12,195,839
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber components with polished internal apertures
- Patent number 12,162,115
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Jennifer Y. Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chambers and coatings for reducing backside damage
- Patent number 12,094,716
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Leonard M. Tedeschi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Yttrium oxide based coating composition
- Patent number 11,920,234
- Issue date Mar 5, 2024
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma erosion resistant thin film coating for high temperature app...
- Patent number 11,773,479
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber components with polished internal apertures
- Patent number 11,724,353
- Issue date Aug 15, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma erosion resistant rare-earth oxide based thin film coatings
- Patent number 11,680,308
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Yttrium oxide based coating composition
- Patent number 11,661,650
- Issue date May 30, 2023
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam sputtering with ion assisted deposition for coatings on ch...
- Patent number 11,566,318
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam sputtering with ion assisted deposition for coatings on ch...
- Patent number 11,566,319
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam sputtering with ion assisted deposition for coatings on ch...
- Patent number 11,566,317
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rare-earth oxide based coatings based on ion assisted deposition
- Patent number 11,424,136
- Issue date Aug 23, 2022
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber components with polished internal apertures
- Patent number 11,370,078
- Issue date Jun 28, 2022
- Applied Materials, Inc.
- Jennifer Y. Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma erosion resistant rare-earth oxide based thin film coatings
- Patent number 11,053,581
- Issue date Jul 6, 2021
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma resistant coating of porous body by atomic layer deposition
- Patent number 10,975,469
- Issue date Apr 13, 2021
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rare-earth oxide based coatings based on ion assisted deposition
- Patent number 10,930,526
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Jennifer Y. Sun
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Smart device fabrication via precision patterning
- Patent number 10,818,481
- Issue date Oct 27, 2020
- Applied Materials, Inc.
- Jennifer Sun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma erosion resistant thin film coating for high temperature app...
- Patent number 10,815,562
- Issue date Oct 27, 2020
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion assisted deposition for rare-earth oxide based thin film coatin...
- Patent number 10,796,888
- Issue date Oct 6, 2020
- Applied Materials, Inc.
- Jennifer Y. Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma resistant coating of porous body by atomic layer deposition
- Patent number 10,745,805
- Issue date Aug 18, 2020
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Slurry plasma spray of plasma resistant ceramic coating
- Patent number 10,730,798
- Issue date Aug 4, 2020
- Applied Materials, Inc.
- Jennifer Sun
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Ion assisted deposition top coat of rare-earth oxide
- Patent number 10,563,297
- Issue date Feb 18, 2020
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion assisted deposition top coat of rare-earth oxide
- Patent number 10,544,500
- Issue date Jan 28, 2020
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma erosion resistant rare-earth oxide based thin film coatings
- Patent number 10,501,843
- Issue date Dec 10, 2019
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High purity metallic top coat for semiconductor manufacturing compo...
- Patent number 10,260,160
- Issue date Apr 16, 2019
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber components with polished internal apertures
- Patent number 10,189,141
- Issue date Jan 29, 2019
- Applied Materials, Inc.
- Jennifer Y. Sun
- B24 - GRINDING POLISHING
Information Patent Grant
Plasma erosion resistant rare-earth oxide based thin film coatings
- Patent number 10,119,188
- Issue date Nov 6, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma erosion resistant thin film coating for high temperature app...
- Patent number 9,976,211
- Issue date May 22, 2018
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion assisted deposition top coat of rare-earth oxide
- Patent number 9,970,095
- Issue date May 15, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support assembly having a plasma resistant protective layer
- Patent number 9,916,998
- Issue date Mar 13, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
YTTRIUM OXIDE BASED COATING AND BULK COMPOSITIONS
- Publication number 20230348290
- Publication date Nov 2, 2023
- Applied Materials, Inc.
- Christopher Laurent Beaudry
- C01 - INORGANIC CHEMISTRY
Information Patent Application
CHAMBER COMPONENTS WITH POLISHED INTERNAL APERTURES
- Publication number 20230339065
- Publication date Oct 26, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...
- Publication number 20230167540
- Publication date Jun 1, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
YTTRIUM OXIDE BASED COATING COMPOSITION
- Publication number 20230160055
- Publication date May 25, 2023
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBERS AND COATINGS FOR REDUCING BACKSIDE DAMAGE
- Publication number 20230077578
- Publication date Mar 16, 2023
- Applied Materials, Inc.
- Leonard M. Tedeschi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER COMPONENTS WITH POLISHED INTERNAL APERTURES
- Publication number 20220297256
- Publication date Sep 22, 2022
- Applied Materials, Inc.
- Jennifer Y. Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
YTTRIUM OXIDE BASED COATING AND BULK COMPOSITIONS
- Publication number 20210403337
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Christopher Laurent Beaudry
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
YTTRIUM OXIDE BASED COATING COMPOSITION
- Publication number 20210317564
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS
- Publication number 20210317563
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Jennifer Y. Sun
- B32 - LAYERED PRODUCTS
Information Patent Application
RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION
- Publication number 20210118703
- Publication date Apr 22, 2021
- Applied Materials, Inc.
- Jennifer Y. Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA EROSION RESISTANT THIN FILM COATING FOR HIGH TEMPERATURE APP...
- Publication number 20210010126
- Publication date Jan 14, 2021
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SLURRY PLASMA SPRAY OF PLASMA RESISTANT CERAMIC COATING
- Publication number 20200325073
- Publication date Oct 15, 2020
- Applied Materials, Inc.
- Jennifer Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING CHAMBER COMPONENT ASSEMBLY WITH PLASMA RESISTA...
- Publication number 20200152425
- Publication date May 14, 2020
- Applied Materials, Inc.
- Vahid FIROUZDOR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS
- Publication number 20200087776
- Publication date Mar 19, 2020
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH PURITY METALLIC TOP COAT FOR SEMICONDUCTOR MANUFACTURING COMPO...
- Publication number 20190194817
- Publication date Jun 27, 2019
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER COMPONENTS WITH POLISHED INTERNAL APERTURES
- Publication number 20190105751
- Publication date Apr 11, 2019
- Applied Materials, Inc.
- Jennifer Y. Sun
- B24 - GRINDING POLISHING
Information Patent Application
EROSION RESISTANT ATOMIC LAYER DEPOSITION COATINGS
- Publication number 20180337026
- Publication date Nov 22, 2018
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA RESISTANT COATING OF POROUS BODY BY ATOMIC LAYER DEPOSITION
- Publication number 20180265973
- Publication date Sep 20, 2018
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA RESISTANT COATING OF POROUS BODY BY ATOMIC LAYER DEPOSITION
- Publication number 20180265972
- Publication date Sep 20, 2018
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA EROSION RESISTANT THIN FILM COATING FOR HIGH TEMPERATURE APP...
- Publication number 20180230587
- Publication date Aug 16, 2018
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY HAVING A PLASMA RESISTANT PROTECTIVE LAYER
- Publication number 20180151401
- Publication date May 31, 2018
- Jennifer Y. Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENDPOINT GAS LINE FILTER FOR SUBSTRATE PROCESSING EQUIPMENT
- Publication number 20180122655
- Publication date May 3, 2018
- Applied Materials, Inc.
- Vahid FIROUZDOR
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
HIGH PURITY METALLIC TOP COAT FOR SEMICONDUCTOR MANUFACTURING COMPO...
- Publication number 20180105938
- Publication date Apr 19, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...
- Publication number 20180105922
- Publication date Apr 19, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION
- Publication number 20180100228
- Publication date Apr 12, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION ASSISTED DEPOSITION FOR RARE-EARTH OXIDE BASED THIN FILM COATIN...
- Publication number 20180096825
- Publication date Apr 5, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS
- Publication number 20180087144
- Publication date Mar 29, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- B32 - LAYERED PRODUCTS
Information Patent Application
ION ASSISTED DEPOSITION TOP COAT OF RARE-EARTH OXIDE
- Publication number 20180080116
- Publication date Mar 22, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS
- Publication number 20180073125
- Publication date Mar 15, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- B32 - LAYERED PRODUCTS
Information Patent Application
ION ASSISTED DEPOSITION TOP COAT OF RARE-EARTH OXIDE
- Publication number 20180030589
- Publication date Feb 1, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Vahid Firouzdor

Person

Patents Grantslast 30 patents

Ion beam sputtering with ion assisted deposition for coatings on ch...

Chamber components with polished internal apertures

Chambers and coatings for reducing backside damage

Yttrium oxide based coating composition

Plasma erosion resistant thin film coating for high temperature app...

Chamber components with polished internal apertures

Plasma erosion resistant rare-earth oxide based thin film coatings

Yttrium oxide based coating composition

Ion beam sputtering with ion assisted deposition for coatings on ch...

Ion beam sputtering with ion assisted deposition for coatings on ch...

Ion beam sputtering with ion assisted deposition for coatings on ch...

Rare-earth oxide based coatings based on ion assisted deposition

Chamber components with polished internal apertures

Plasma erosion resistant rare-earth oxide based thin film coatings

Plasma resistant coating of porous body by atomic layer deposition

Rare-earth oxide based coatings based on ion assisted deposition

Smart device fabrication via precision patterning

Plasma erosion resistant thin film coating for high temperature app...

Ion assisted deposition for rare-earth oxide based thin film coatin...

Plasma resistant coating of porous body by atomic layer deposition

Slurry plasma spray of plasma resistant ceramic coating

Ion assisted deposition top coat of rare-earth oxide

Ion assisted deposition top coat of rare-earth oxide

Plasma erosion resistant rare-earth oxide based thin film coatings

High purity metallic top coat for semiconductor manufacturing compo...

Chamber components with polished internal apertures

Plasma erosion resistant rare-earth oxide based thin film coatings

Plasma erosion resistant thin film coating for high temperature app...

Ion assisted deposition top coat of rare-earth oxide

Substrate support assembly having a plasma resistant protective layer

Patents Applicationslast 30 patents

YTTRIUM OXIDE BASED COATING AND BULK COMPOSITIONS

CHAMBER COMPONENTS WITH POLISHED INTERNAL APERTURES

ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...

YTTRIUM OXIDE BASED COATING COMPOSITION

CHAMBERS AND COATINGS FOR REDUCING BACKSIDE DAMAGE

CHAMBER COMPONENTS WITH POLISHED INTERNAL APERTURES

YTTRIUM OXIDE BASED COATING AND BULK COMPOSITIONS

YTTRIUM OXIDE BASED COATING COMPOSITION

PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS

RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION

PLASMA EROSION RESISTANT THIN FILM COATING FOR HIGH TEMPERATURE APP...

SLURRY PLASMA SPRAY OF PLASMA RESISTANT CERAMIC COATING

SUBSTRATE PROCESSING CHAMBER COMPONENT ASSEMBLY WITH PLASMA RESISTA...

PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS

HIGH PURITY METALLIC TOP COAT FOR SEMICONDUCTOR MANUFACTURING COMPO...

CHAMBER COMPONENTS WITH POLISHED INTERNAL APERTURES

EROSION RESISTANT ATOMIC LAYER DEPOSITION COATINGS

PLASMA RESISTANT COATING OF POROUS BODY BY ATOMIC LAYER DEPOSITION

PLASMA RESISTANT COATING OF POROUS BODY BY ATOMIC LAYER DEPOSITION

PLASMA EROSION RESISTANT THIN FILM COATING FOR HIGH TEMPERATURE APP...

SUBSTRATE SUPPORT ASSEMBLY HAVING A PLASMA RESISTANT PROTECTIVE LAYER

ENDPOINT GAS LINE FILTER FOR SUBSTRATE PROCESSING EQUIPMENT

HIGH PURITY METALLIC TOP COAT FOR SEMICONDUCTOR MANUFACTURING COMPO...

ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...

RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION

ION ASSISTED DEPOSITION FOR RARE-EARTH OXIDE BASED THIN FILM COATIN...

PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS

ION ASSISTED DEPOSITION TOP COAT OF RARE-EARTH OXIDE

PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS

ION ASSISTED DEPOSITION TOP COAT OF RARE-EARTH OXIDE