Vaibhaw Vishal

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Instrumented substrate apparatus for acquiring measurement paramete...
- Patent number 11,150,140
- Issue date Oct 19, 2021
- KLA Corporation
- Mei Sun
- G01 - MEASURING TESTING
Information Patent Grant
Methods of attaching a module on wafer substrate
- Patent number 9,514,970
- Issue date Dec 6, 2016
- KLA-Tencor Corporation
- Vaibhaw Vishal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process condition measuring device (PCMD) and method for measuring...
- Patent number 9,134,186
- Issue date Sep 15, 2015
- KLA-Tencor Corporation
- Mei Sun
- G01 - MEASURING TESTING
Information Patent Grant
Heat shield module for substrate-like metrology device
- Patent number 8,681,493
- Issue date Mar 25, 2014
- KLA-Tencor Corporation
- Vaibhaw Vishal
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
Instrumented Substrate Apparatus for Acquiring Measurement Paramete...
- Publication number 20170219437
- Publication date Aug 3, 2017
- KLA-Tencor Corporation
- Mei Sun
- G01 - MEASURING TESTING
Information Patent Application
METHODS OF ATTACHING A MODULE ON WAFER SUBSTRATE
- Publication number 20140202267
- Publication date Jul 24, 2014
- KLA-Tencor Corporation
- Vaibhaw Vishal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT SHIELD MODULE FOR SUBSTRATE-LIKE METROLOGY DEVICE
- Publication number 20120287574
- Publication date Nov 15, 2012
- KLA-Tencor Corporation
- Vaibhaw Vishal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS CONDITION MEASURING DEVICE (PCMD) AND METHOD FOR MEASURING...
- Publication number 20120203495
- Publication date Aug 9, 2012
- KLA-Tencor Corporation
- Mei Sun
- G01 - MEASURING TESTING