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Vaidya Bharadwaj
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Austin, TX, US
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Patents Grants
last 30 patents
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Patent Grant
Localized process control using a plasma system
Patent number
10,304,668
Issue date
May 28, 2019
Tokyo Electron Limited
Brian J. Coppa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Differential metal gate etching process
Patent number
8,501,628
Issue date
Aug 6, 2013
Tokyo Electron Limited
Vinh Hoang Luong
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Localized Process Control Using A Plasma System
Publication number
20170345626
Publication date
Nov 30, 2017
TOKYO ELECTRON LIMITED
Brian J. Coppa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...