TREA

Vaidya Nathan Balasubramaniam

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  • Beverly, MA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Dry developing method
    • Patent number 6,986,851
    • Issue date Jan 17, 2006
    • Tokyo Electron Limited
    • Akinori Kitamura
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Oxide film etching method
    • Publication number 20040173573
    • Publication date Sep 9, 2004
    • TOKYO ELECTRON LIMITED
    • Yoshiki Igarashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Dry developing method
    • Publication number 20040169009
    • Publication date Sep 2, 2004
    • Akinori Kitamura
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Oxide film etching method
    • Publication number 20020055263
    • Publication date May 9, 2002
    • Yoshiki Igarashi
    • H01 - BASIC ELECTRIC ELEMENTS