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Vaino Kilpi

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  • Espoo, FI
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Patents Grantslast 30 patents

  • Information Patent Grant

    Adjustable fluid inlet assembly for a substrate processing apparatu...
    • Patent number 11,505,864
    • Issue date Nov 22, 2022
    • Picosun Oy
    • Timo Malinen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sample protection
    • Patent number 11,414,758
    • Issue date Aug 16, 2022
    • Picosun Oy
    • Juhana Kostamo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate loading in an ALD reactor
    • Patent number 11,280,001
    • Issue date Mar 22, 2022
    • Picosun Oy
    • Vaino Kilpi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus and method
    • Patent number 11,004,707
    • Issue date May 11, 2021
    • Picosun Oy
    • Väinö Kilpi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Deposition reactor with plasma source
    • Patent number 10,494,718
    • Issue date Dec 3, 2019
    • Picosun Oy
    • Vaino Kilpi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate loading in an ALD reactor
    • Patent number 10,161,038
    • Issue date Dec 25, 2018
    • Picosun Oy
    • Vaino Kilpi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Atomic layer deposition with plasma source
    • Patent number 9,868,131
    • Issue date Jan 16, 2018
    • Picosun Oy
    • Vaino Kilpi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method and apparatus for forming a substrate web track in an atomic...
    • Patent number 9,745,661
    • Issue date Aug 29, 2017
    • Picosun Oy
    • Timo Malinen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Atomic layer deposition with plasma source
    • Patent number 9,095,869
    • Issue date Aug 4, 2015
    • Picosun Oy
    • Vaino Kilpi
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Apparatus for growing thin films
    • Patent number 6,835,416
    • Issue date Dec 28, 2004
    • ASM International N.V
    • Vaino Kilpi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Apparatus for growing thin films
    • Patent number 6,689,210
    • Issue date Feb 10, 2004
    • ASM Microchemistry Oy
    • Pekka T. Soininen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Apparatus for growing thin films
    • Patent number 6,551,406
    • Issue date Apr 22, 2003
    • ASM Microchemistry Oy
    • Vaino Kilpi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Apparatus for growing thin films
    • Patent number 6,447,607
    • Issue date Sep 10, 2002
    • ASM Microchemistry Oy
    • Pekka T. Soininen
    • C30 - CRYSTAL GROWTH
  • Information Patent Grant

    Flushing operating means for vacuum toilet
    • Patent number 4,621,379
    • Issue date Nov 11, 1986
    • Oy Wartsila AB
    • Vaino Kilpi
    • E03 - WATER SUPPLY SEWERAGE

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND METHOD
    • Publication number 20240162019
    • Publication date May 16, 2024
    • Picosun Oy
    • Väinö KILPI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ADJUSTABLE FLUID INLET ASSEMBLY FOR A SUBSTRATE PROCESSING APPARATU...
    • Publication number 20230090809
    • Publication date Mar 23, 2023
    • Picosun Oy
    • Timo MALINEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND METHOD
    • Publication number 20230067579
    • Publication date Mar 2, 2023
    • Picosun Oy
    • Väinö KILPI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND METHOD
    • Publication number 20220403514
    • Publication date Dec 22, 2022
    • Picosun Oy
    • Timo VÄHÄ-OJALA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND METHOD
    • Publication number 20220356577
    • Publication date Nov 10, 2022
    • Picosun Oy
    • Väinö KILPI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND METHOD
    • Publication number 20220356575
    • Publication date Nov 10, 2022
    • Picosun Oy
    • Väinö KILPI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND METHOD
    • Publication number 20220359170
    • Publication date Nov 10, 2022
    • Picosun Oy
    • Väinö KILPI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND METHOD
    • Publication number 20210189560
    • Publication date Jun 24, 2021
    • Picosun Oy
    • Timo MALINEN
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    SAMPLE PROTECTION
    • Publication number 20200308698
    • Publication date Oct 1, 2020
    • Picosun Oy
    • Juhana KOSTAMO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE LOADING IN AN ALD REACTOR
    • Publication number 20190048465
    • Publication date Feb 14, 2019
    • Picosun Oy
    • Vaino Kilpi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Atomic Layer Deposition with Plasma Source
    • Publication number 20180099304
    • Publication date Apr 12, 2018
    • Picosun Oy
    • Vaino Kilpi
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    FORMING A SUBSTRATE WEB TRACK IN AN ATOMIC LAYER DEPOSITION REACTOR
    • Publication number 20160138163
    • Publication date May 19, 2016
    • Picosun Oy
    • Timo Malinen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Atomic Layer Deposition with Plasma Source
    • Publication number 20150322569
    • Publication date Nov 12, 2015
    • Picosun Oy
    • Vaino Kilpi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE LOADING IN AN ALD REACTOR
    • Publication number 20150299859
    • Publication date Oct 22, 2015
    • Picosun Oy
    • Vaino KILPI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION REACTOR WITH PLASMA SOURCE
    • Publication number 20140087093
    • Publication date Mar 27, 2014
    • Picosun Oy
    • Vaino Kilpi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Atomic Layer Deposition with Plasma Source
    • Publication number 20140024223
    • Publication date Jan 23, 2014
    • Picosun Oy
    • Vaino Kilpi
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    Apparatus for growing thin films
    • Publication number 20030140854
    • Publication date Jul 31, 2003
    • Vaino Kilpi
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    Apparatus for growing thin films
    • Publication number 20020185060
    • Publication date Dec 12, 2002
    • Pekka T. Soininen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Apparatus for growing thin films
    • Publication number 20010013312
    • Publication date Aug 16, 2001
    • Pekka T. Soininen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Apparatus for growing thin films
    • Publication number 20010014371
    • Publication date Aug 16, 2001
    • Vaino Kilpi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...