Valery Alexeyey

Follow

Person

Moscow, RU

People

Patents Applicationslast 30 patents

Information Patent Application
Modular ion source
- Publication number 20050057167
- Publication date Mar 17, 2005
- Daniel E. Siegfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Modular uniform gas distribution system in an ion source
- Publication number 20050045035
- Publication date Mar 3, 2005
- Daniel E. Siegfried
- H01 - BASIC ELECTRIC ELEMENTS