Valery V. Felmetsger

Person

Goleta, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Stress adjustment in reactive sputtering
- Patent number 8,808,513
- Issue date Aug 19, 2014
- OEM Group, Inc.
- Pavel N Laptev
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stress adjustment in reactive sputtering
- Patent number 8,691,057
- Issue date Apr 8, 2014
- OEM Group
- Pavel N. Laptev
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputter deposition of cermet resistor films with low temperature co...
- Patent number 8,482,375
- Issue date Jul 9, 2013
- OEM Group, Inc.
- Valery V. Felmetsger
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Permanent adherence of the back end of a wafer to an electrical com...
- Patent number 7,208,396
- Issue date Apr 24, 2007
- Tegal Corporation
- Valery V. Felmetsger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive sputtering of silicon nitride films by RF supported DC mag...
- Patent number 7,179,350
- Issue date Feb 20, 2007
- Tegal Corporation
- Pavel N. Laptev
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Sputter deposition of cermet resistor films with low temperature co...
- Publication number 20100301989
- Publication date Dec 2, 2010
- OEM GROUP
- Valery V. Felmetsger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stress adjustment in reactive sputtering
- Publication number 20090242388
- Publication date Oct 1, 2009
- Tegal Corporation
- Pavel N. LAPTEV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Control of crystal orientation and stress in sputter deposited thin...
- Publication number 20090246385
- Publication date Oct 1, 2009
- Tegal Corporation
- Valery FELMETSGER
- C30 - CRYSTAL GROWTH
Information Patent Application
Stress adjustment in reactive sputtering
- Publication number 20090242392
- Publication date Oct 1, 2009
- Tegal Corporation
- Pavel N. LAPTEV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High-adhesive backside metallization
- Publication number 20080083611
- Publication date Apr 10, 2008
- Tegal Corporation
- Valery Felmetsger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reactive sputtering of silicon nitride films by RF supported DC mag...
- Publication number 20040231972
- Publication date Nov 25, 2004
- Pavel N. Laptev
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Permanent adherence of the back end of a wafer to an electrical com...
- Publication number 20030132524
- Publication date Jul 17, 2003
- Valery V. Felmetsger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Valery V. Felmetsger

Person

Patents Grantslast 30 patents

Stress adjustment in reactive sputtering

Stress adjustment in reactive sputtering

Sputter deposition of cermet resistor films with low temperature co...

Permanent adherence of the back end of a wafer to an electrical com...

Reactive sputtering of silicon nitride films by RF supported DC mag...

Patents Applicationslast 30 patents

Sputter deposition of cermet resistor films with low temperature co...

Stress adjustment in reactive sputtering

Control of crystal orientation and stress in sputter deposited thin...

Stress adjustment in reactive sputtering

High-adhesive backside metallization

Reactive sputtering of silicon nitride films by RF supported DC mag...

Permanent adherence of the back end of a wafer to an electrical com...