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Vanina TODOROVA
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Crolles, FR
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last 30 patents
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Patent Application
DEVICE AND METHOD FOR DISPENSING A GAS PHASE OF A SOLID PRECURSOR
Publication number
20240368758
Publication date
Nov 7, 2024
Air Liquide Electronics Systems
Sonia PLAZA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
FACILITY AND METHOD FOR DISTRIBUTING A GAS MIXTURE FOR DOPING SILIC...
Publication number
20230285911
Publication date
Sep 14, 2023
Air Liquide Electronic Systems
Vanina TODOROVA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
INSTALLATION AND METHOD FOR DISTRIBUTING A GAS MIXTURE
Publication number
20230277993
Publication date
Sep 7, 2023
Air Liquide Electronics Systems
Vanina TODOROVA
G05 - CONTROLLING REGULATING