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Varun Sharma

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Patents Grantslast 30 patents

  • Information Patent Grant

    Formation of SiCN thin films
    • Patent number 12,341,005
    • Issue date Jun 24, 2025
    • ASM IP Holding B.V.
    • Varun Sharma
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Thermal atomic layer etching processes
    • Patent number 12,320,012
    • Issue date Jun 3, 2025
    • ASM IP Holding B.V.
    • Tom E. Blomberg
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Grant

    Thermal atomic layer etching processes
    • Patent number 12,312,696
    • Issue date May 27, 2025
    • ASM IP Holding B.V.
    • Tom E. Blomberg
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Grant

    Deposition of organic films
    • Patent number 12,300,505
    • Issue date May 13, 2025
    • ASM IP Holding B.V.
    • Eva E. Tois
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Showerhead device for semiconductor processing system
    • Patent number 12,237,182
    • Issue date Feb 25, 2025
    • ASM IP Holding B.V.
    • Tom E. Blomberg
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Methods of forming copper iodide layer and structures including cop...
    • Patent number 12,234,548
    • Issue date Feb 25, 2025
    • ASM IP Holding B.V.
    • Charles Dezelah
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of cleaning a surface
    • Patent number 12,217,954
    • Issue date Feb 4, 2025
    • ASM IP Holding B.V.
    • Shaoren Deng
    • B08 - CLEANING
  • Information Patent Grant

    Deposition of organic films
    • Patent number 12,205,820
    • Issue date Jan 21, 2025
    • ASM IP Holding B.V.
    • Eva E. Tois
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Silicon oxide deposition method
    • Patent number 12,148,609
    • Issue date Nov 19, 2024
    • ASM IP Holding B.V.
    • Varun Sharma
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Formation of SiOCN thin films
    • Patent number 12,142,479
    • Issue date Nov 12, 2024
    • ASM IP Holding B.V.
    • Varun Sharma
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Toposelective vapor deposition using an inhibitor
    • Patent number 12,136,552
    • Issue date Nov 5, 2024
    • ASM IP Holding B.V.
    • Andrea Illiberi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Atomic layer etching processes
    • Patent number 12,094,686
    • Issue date Sep 17, 2024
    • ASM IP Holding B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Atomic layer etching
    • Patent number 12,040,195
    • Issue date Jul 16, 2024
    • ASM IP Holding B.V.
    • Charles Dezelah
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Atomic layer deposition of III-V compounds to form V-NAND devices
    • Patent number 11,956,977
    • Issue date Apr 9, 2024
    • ASM IP Holding B.V.
    • Tom E. Blomberg
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Showerhead device for semiconductor processing system
    • Patent number 11,948,813
    • Issue date Apr 2, 2024
    • ASM IP Holding B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Methods for forming a rhenium-containing film on a substrate by a c...
    • Patent number 11,769,670
    • Issue date Sep 26, 2023
    • ASM IP Holding B.V.
    • Varun Sharma
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Passivation against vapor deposition
    • Patent number 11,739,422
    • Issue date Aug 29, 2023
    • ASM IP Holding B.V.
    • Varun Sharma
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Thermal atomic layer etching processes
    • Patent number 11,739,428
    • Issue date Aug 29, 2023
    • ASM IP Holding B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Thermal atomic layer etching processes
    • Patent number 11,739,427
    • Issue date Aug 29, 2023
    • ASM IP Holding B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Deposition of organic films
    • Patent number 11,728,175
    • Issue date Aug 15, 2023
    • ASM IP Holding B.V.
    • Eva E. Tois
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Atomic layer deposition of indium gallium zinc oxide
    • Patent number 11,664,222
    • Issue date May 30, 2023
    • ASM IP Holding, B.V.
    • Oreste Madia
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Atomic layer etching processes
    • Patent number 11,640,899
    • Issue date May 2, 2023
    • ASM IP Holding B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Atomic layer etching
    • Patent number 11,574,813
    • Issue date Feb 7, 2023
    • ASM IP Holding B.V.
    • Charles Dezelah
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Showerhead device for semiconductor processing system
    • Patent number 11,437,249
    • Issue date Sep 6, 2022
    • ASM IP Holding B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Passivation against vapor deposition
    • Patent number 11,396,701
    • Issue date Jul 26, 2022
    • ASM IP Holding B.V.
    • Varun Sharma
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Deposition of organic films
    • Patent number 11,387,107
    • Issue date Jul 12, 2022
    • ASM IP Holding B.V.
    • Eva E. Tois
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Chemical dispensing apparatus and methods for dispensing a chemical...
    • Patent number 11,387,120
    • Issue date Jul 12, 2022
    • ASM IP Holding B.V.
    • Varun Sharma
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Thermal atomic layer etching processes
    • Patent number 11,230,770
    • Issue date Jan 25, 2022
    • ASM IP Holding B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Thermal atomic layer etching processes
    • Patent number 11,230,769
    • Issue date Jan 25, 2022
    • ASM IP Holding B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Atomic layer etching processes
    • Patent number 11,183,367
    • Issue date Nov 23, 2021
    • ASM IP Holding B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    METHODS OF FORMING COPPER IODIDE LAYER AND STRUCTURES INCLUDING COP...
    • Publication number 20250171894
    • Publication date May 29, 2025
    • ASM IP HOLDING B.V.
    • Charles Dezelah
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM
    • Publication number 20250167013
    • Publication date May 22, 2025
    • ASM IP HOLDING B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    THERMAL ATOMIC LAYER ETCHING PROCESSES
    • Publication number 20250154662
    • Publication date May 15, 2025
    • ASM IP HOLDING B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF CLEANING A SURFACE
    • Publication number 20250149325
    • Publication date May 8, 2025
    • ASM IP HOLDING B.V.
    • Shaoren Deng
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION OF ORGANIC FILMS
    • Publication number 20250118562
    • Publication date Apr 10, 2025
    • ASM IP HOLDING B.V.
    • Eva E. Tois
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    METHODS FOR FORMING A DOPED HAFNIUM ZIRCONIUM OXIDE LAYER ON A SUBS...
    • Publication number 20250101579
    • Publication date Mar 27, 2025
    • ASM IP HOLDING B.V.
    • Alessandra Leonhardt
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ATOMIC LAYER ETCHING PROCESSES
    • Publication number 20250037970
    • Publication date Jan 30, 2025
    • ASM IP HOLDING B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SILICON OXIDE DEPOSITION METHOD
    • Publication number 20250037988
    • Publication date Jan 30, 2025
    • ASM IP HOLDING B.V.
    • Varun Sharma
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Formation of SiOCN Thin Films
    • Publication number 20250029832
    • Publication date Jan 23, 2025
    • ASM IP HOLDING B.V.
    • Varun Sharma
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    LOW LEAKAGE CAPACITORS, AND RELATED STRUCTURES, METHODS, AND SYSTEMS
    • Publication number 20240339493
    • Publication date Oct 10, 2024
    • ASM IP HOLDING B.V.
    • Alessandra Leonhardt
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SHOWERHEAD DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM
    • Publication number 20240332039
    • Publication date Oct 3, 2024
    • ASM IP HOLDING B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS AND APPARATUSES FOR CARBON DEPOSITION
    • Publication number 20240222107
    • Publication date Jul 4, 2024
    • ASM IP HOLDING B.V.
    • Varun Sharma
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYSTEMS, DEVICES, AND METHODS FOR FORMING LAYERS COMPRISING A GROUP...
    • Publication number 20240175129
    • Publication date May 30, 2024
    • ASM IP HOLDING B.V.
    • Bart Vermeulen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEMICONDUCTING OXIDE CHANNEL FOR 3D NAND AND METHOD OF MAKING
    • Publication number 20240153767
    • Publication date May 9, 2024
    • ASM IP HOLDING B.V.
    • Bart Vermeulen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    THERMAL ATOMIC LAYER ETCHING PROCESSES
    • Publication number 20240026548
    • Publication date Jan 25, 2024
    • ASM IP HOLDING B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    THERMAL ATOMIC LAYER ETCHING PROCESSES
    • Publication number 20230374671
    • Publication date Nov 23, 2023
    • ASM IP HOLDING B.V.
    • Tom E. Blomberg
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Application

    DEPOSITION OF ORGANIC FILMS
    • Publication number 20230343601
    • Publication date Oct 26, 2023
    • ASM IP HOLDING B.V.
    • Eva E. Tois
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEMICONDUCTOR PROCESSING SYSTEM WITH GAS LINE FOR TRANSPORTING EXCI...
    • Publication number 20230290613
    • Publication date Sep 14, 2023
    • ASM IP HOLDING B.V.
    • Varun Sharma
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ATOMIC LAYER ETCHING
    • Publication number 20230268187
    • Publication date Aug 24, 2023
    • ASM IP HOLDING B.V.
    • Charles Dezelah
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ATOMIC LAYER ETCHING PROCESSES
    • Publication number 20230253182
    • Publication date Aug 10, 2023
    • ASM IP HOLDING B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS OF FORMING COPPER IODIDE LAYER AND STRUCTURES INCLUDING COP...
    • Publication number 20230243032
    • Publication date Aug 3, 2023
    • ASM IP HOLDING B.V.
    • Charles Dezelah
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ETCH PROCESS AND A PROCESSING ASSEMBLY
    • Publication number 20230170221
    • Publication date Jun 1, 2023
    • ASM IP HOLDING, B.V.
    • Charles Dezelah
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SHOWERHEAD DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM
    • Publication number 20230102839
    • Publication date Mar 30, 2023
    • ASM IP HOLDING B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS AND SYSTEMS FOR DEPOSITION TO GAPS USING AN INHIBITOR
    • Publication number 20230069459
    • Publication date Mar 2, 2023
    • ASM IP HOLDING B.V.
    • Suvi P. Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    In situ generation process and system
    • Publication number 20230032495
    • Publication date Feb 2, 2023
    • ASM IP HOLDING B.V.
    • Varun Sharma
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DEPOSITION OF ORGANIC FILMS
    • Publication number 20230011277
    • Publication date Jan 12, 2023
    • ASM IP HOLDING B.V.
    • Eva E. Tois
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    PASSIVATION AGAINST VAPOR DEPOSITION
    • Publication number 20220349059
    • Publication date Nov 3, 2022
    • ASM IP HOLDING B.V.
    • Varun Sharma
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TOPOSELECTIVE VAPOR DEPOSITION USING AN INHIBITOR
    • Publication number 20220181163
    • Publication date Jun 9, 2022
    • ASM IP HOLDING B.V.
    • Andrea Illiberi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    THERMAL ATOMIC LAYER ETCHING PROCESSES
    • Publication number 20220119961
    • Publication date Apr 21, 2022
    • ASM IP HOLDING B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    THERMAL ATOMIC LAYER ETCHING PROCESSES
    • Publication number 20220119962
    • Publication date Apr 21, 2022
    • ASM IP HOLDING B.V.
    • Tom E. Blomberg
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...