Vasil Vorsa

Person

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma etch-resistant film and a method for its fabrication
- Patent number 11,421,319
- Issue date Aug 23, 2022
- Beneq Oy
- Pekka J. Soininen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma etch-resistant film and a method for its fabrication
- Patent number 10,961,620
- Issue date Mar 30, 2021
- Beneq Oy
- Pekka J. Soininen
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Amino vinylsilane precursors for stressed SiN films
- Patent number 8,580,993
- Issue date Nov 12, 2013
- Air Products and Chemicals, Inc.
- Vasil Vorsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
UV absorption based monitor and control of chloride gas stream
- Patent number 8,431,419
- Issue date Apr 30, 2013
- Soitec
- Ronald Thomas Bertram
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Plasma Resistant YxHfyOz Homogeneous Films and Methods of Film Prod...
- Publication number 20230044068
- Publication date Feb 9, 2023
- Greene, Tweed Technologies, Inc.
- Alexadru C. Pavel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MIXED SUBSTANTIALLY HOMOGENOUS COATINGS DEPOSITED BY ALD
- Publication number 20220098735
- Publication date Mar 31, 2022
- Greene, Tweed Technologies, Inc.
- Alexandru C. Pavel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ETCH-RESISTANT FILM AND A METHOD FOR ITS FABRICATION
- Publication number 20210115555
- Publication date Apr 22, 2021
- BENEQ OY
- Pekka J. SOININEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Resistant Multi-Layer Coatings and Related Methods of Prepar...
- Publication number 20200131632
- Publication date Apr 30, 2020
- Greene, Tweed Technologies, Inc.
- Alexandru Pavel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
A PLASMA ETCH-RESISTANT FILM AND A METHOD FOR ITS FABRICATION
- Publication number 20200080197
- Publication date Mar 12, 2020
- BENEQ OY
- Pekka J. SOININEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Etch Resistant Films, Articles Bearing Plasma Etch Resistant...
- Publication number 20140099491
- Publication date Apr 10, 2014
- Mohammed Ameen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Amino Vinylsilane Precursors for Stressed SiN Films
- Publication number 20140065844
- Publication date Mar 6, 2014
- Vasil Vorsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Etch Resistant, Highly Oriented Yttria Films, Coated Substra...
- Publication number 20130277332
- Publication date Oct 24, 2013
- Mohammed Mahbubul Aheem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Etch Resistant, Highly Oriented Yttria Films, Coated Substra...
- Publication number 20120103519
- Publication date May 3, 2012
- Greene, Tweed of Delaware, Inc.
- Mohammed Aheem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UV ABSORPTION BASED MONITOR AND CONTROL OF CHLORIDE GAS STREAM
- Publication number 20110212546
- Publication date Sep 1, 2011
- S.O.I.Tec Silicon on Insulator Technologies
- Ronald Thomas Bertram Jr.
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS FOR IN-SITU CHAMBER CLEANING PROCESS FOR HIGH VOLUME MANUFA...
- Publication number 20100180913
- Publication date Jul 22, 2010
- Chantal Arena
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Amino Vinylsilane Precursors for Stressed SiN Films
- Publication number 20100120262
- Publication date May 13, 2010
- Air Products and Chemicals, Inc.
- Vasil Vorsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thermal F2 etch process for cleaning CVD chambers
- Publication number 20080142046
- Publication date Jun 19, 2008
- Andrew David Johnson
- B08 - CLEANING

Vasil Vorsa

Person

Patents Grantslast 30 patents

Plasma etch-resistant film and a method for its fabrication

Plasma etch-resistant film and a method for its fabrication

Amino vinylsilane precursors for stressed SiN films

UV absorption based monitor and control of chloride gas stream

Patents Applicationslast 30 patents

Plasma Resistant YxHfyOz Homogeneous Films and Methods of Film Prod...

MIXED SUBSTANTIALLY HOMOGENOUS COATINGS DEPOSITED BY ALD

PLASMA ETCH-RESISTANT FILM AND A METHOD FOR ITS FABRICATION

Plasma Resistant Multi-Layer Coatings and Related Methods of Prepar...

A PLASMA ETCH-RESISTANT FILM AND A METHOD FOR ITS FABRICATION

Plasma Etch Resistant Films, Articles Bearing Plasma Etch Resistant...

Amino Vinylsilane Precursors for Stressed SiN Films

Plasma Etch Resistant, Highly Oriented Yttria Films, Coated Substra...

Plasma Etch Resistant, Highly Oriented Yttria Films, Coated Substra...

UV ABSORPTION BASED MONITOR AND CONTROL OF CHLORIDE GAS STREAM

METHODS FOR IN-SITU CHAMBER CLEANING PROCESS FOR HIGH VOLUME MANUFA...

Amino Vinylsilane Precursors for Stressed SiN Films

Thermal F2 etch process for cleaning CVD chambers