Venkat Pallem

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Hockessin, DE, US

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Patents Grantslast 30 patents

Information Patent Grant
Nitridation of atomic layer deposited high-k dielectrics using tris...
- Patent number 9,064,694
- Issue date Jun 23, 2015
- Tokyo Electron Limited
- Steven P Consiglio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
NITRIDATION OF ATOMIC LAYER DEPOSITED HIGH-K DIELECTRICS USING TRIS...
- Publication number 20140017907
- Publication date Jan 16, 2014
- Steven P. Consiglio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...