Venkatanarayana SHANKARAMURTHY

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for substrate support temperature control
- Patent number 12,062,567
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Zubin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable loop control feature
- Patent number 11,841,692
- Issue date Dec 12, 2023
- Applied Materials, Inc.
- Venkatanarayana Shankaramurthy
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Grant
Process fluid path switching in recipe operations
- Patent number 11,714,430
- Issue date Aug 1, 2023
- Applied Materials, Inc.
- Mitesh Sanghvi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Controlling concentration profiles for deposited films using machin...
- Patent number 11,532,525
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Anton V Baryshnikov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process fluid path switching in recipe operations
- Patent number 11,487,304
- Issue date Nov 1, 2022
- Applied Materials, Inc.
- Mitesh Sanghvi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Variable loop control feature
- Patent number 11,449,026
- Issue date Sep 20, 2022
- Applied Materials, Inc.
- Venkatanarayana Shankaramurthy
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Grant
Loadlock integrated bevel etcher system
- Patent number 11,031,262
- Issue date Jun 8, 2021
- Applied Materials, Inc.
- Saptarshi Basu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Loadlock integrated bevel etcher system
- Patent number 10,636,684
- Issue date Apr 28, 2020
- Applied Materials, Inc.
- Saptarshi Basu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Loadlock integrated bevel etcher system
- Patent number 10,403,515
- Issue date Sep 3, 2019
- Applied Materials, Inc.
- Saptarshi Basu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
RESIDUAL THICKNESS COMPENSATION
- Publication number 20240288838
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Albert Liu
- G05 - CONTROLLING REGULATING
Information Patent Application
CLEANING OPERATIONS BASED ON DEPOSITION THICKNESS
- Publication number 20240229234
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Victor Zamarian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FLUID PATH SWITCHING IN RECIPE OPERATIONS
- Publication number 20230021640
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- Mitesh Sanghvi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VARIABLE LOOP CONTROL FEATURE
- Publication number 20230014145
- Publication date Jan 19, 2023
- Applied Materials, Inc.
- Venkatanarayana Shankaramurthy
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
CONTROLLING CONCENTRATION PROFILES FOR DEPOSITED FILMS USING MACHIN...
- Publication number 20220285232
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Anton V. Baryshnikov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS FLUID PATH SWITCHING IN RECIPE OPERATIONS
- Publication number 20220221880
- Publication date Jul 14, 2022
- Applied Materials, Inc.
- Mitesh Sanghvi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VARIABLE LOOP CONTROL FEATURE
- Publication number 20210373523
- Publication date Dec 2, 2021
- Applied Materials, Inc.
- Venkatanarayana Shankaramurthy
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL
- Publication number 20210320027
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Zubin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM
- Publication number 20200234982
- Publication date Jul 23, 2020
- Applied Materials, Inc.
- Saptarshi BASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM
- Publication number 20190371630
- Publication date Dec 5, 2019
- Applied Materials, Inc.
- Saptarshi BASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM
- Publication number 20170092511
- Publication date Mar 30, 2017
- Applied Materials, Inc.
- Saptarshi BASU
- H01 - BASIC ELECTRIC ELEMENTS

Venkatanarayana SHANKARAMURTHY

Person

Patents Grantslast 30 patents

Systems and methods for substrate support temperature control

Variable loop control feature

Process fluid path switching in recipe operations

Controlling concentration profiles for deposited films using machin...

Process fluid path switching in recipe operations

Variable loop control feature

Loadlock integrated bevel etcher system

Loadlock integrated bevel etcher system

Loadlock integrated bevel etcher system

Patents Applicationslast 30 patents

RESIDUAL THICKNESS COMPENSATION

CLEANING OPERATIONS BASED ON DEPOSITION THICKNESS

PROCESS FLUID PATH SWITCHING IN RECIPE OPERATIONS

VARIABLE LOOP CONTROL FEATURE

CONTROLLING CONCENTRATION PROFILES FOR DEPOSITED FILMS USING MACHIN...

PROCESS FLUID PATH SWITCHING IN RECIPE OPERATIONS

VARIABLE LOOP CONTROL FEATURE

SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL

LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM

LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM

LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM