Venugopal Vellanki

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Process window optimizer
- Patent number 12,141,507
- Issue date Nov 12, 2024
- ASML Netherlands B.V.
- Stefan Hunsche
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Process variability aware adaptive inspection and metrology
- Patent number 12,092,965
- Issue date Sep 17, 2024
- ASML Netherlands B.V.
- Venugopal Vellanki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for determining candidate patterns from set of patterns of a...
- Patent number 11,460,784
- Issue date Oct 4, 2022
- ASML Netherlands B.V.
- Venugopal Vellanki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process window optimizer
- Patent number 11,238,189
- Issue date Feb 1, 2022
- ASML Netherlands B.V.
- Stefan Hunsche
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for pattern configuration
- Patent number 11,176,307
- Issue date Nov 16, 2021
- ASML Netherlands B.V.
- Venugopal Vellanki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Process variability aware adaptive inspection and metrology
- Patent number 11,003,093
- Issue date May 11, 2021
- ASML Netherlands B.V.
- Venugopal Vellanki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Process variability aware adaptive inspection and metrology
- Patent number 10,514,614
- Issue date Dec 24, 2019
- ASML Netherlands B.V.
- Venugopal Vellanki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method to ensure source and image stability
- Patent number 9,459,537
- Issue date Oct 4, 2016
- ASML Netherlands B.V.
- Yu Cao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PROCESS WINDOW OPTIMIZER
- Publication number 20250053702
- Publication date Feb 13, 2025
- ASML NETHERLANDS B.V.
- Stefan HUNSCHE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS FOR CLAMPING A SUBSTRATE ON A MONO-POLAR ELECTROSTATIC CH...
- Publication number 20240404861
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- SUSHIM KOSHTI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER CLEAN FOR DRY DEVELOP OF METAL ORGANIC PHOTORESISTS
- Publication number 20240274414
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- NEELA AYALASOMAYAJULA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS WINDOW OPTIMIZER
- Publication number 20220147665
- Publication date May 12, 2022
- ASML NETHERLANDS B.V.
- Stefan HUNSCHE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DETERMINING CANDIDATE PATTERNS FROM SET OF PATTERNS OF A...
- Publication number 20210325786
- Publication date Oct 21, 2021
- ASML NETHERLANDS B.V.
- Venugopal VELLANKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESS VARIABILITY AWARE ADAPTIVE INSPECTION AND METROLOGY
- Publication number 20210255548
- Publication date Aug 19, 2021
- ASML NETHERLANDS B.V.
- Venugopal VELLANKI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR PATTERN CONFIGURATION
- Publication number 20200193080
- Publication date Jun 18, 2020
- ASML NETHERLANDS B.V.
- Venugopal VELLANKI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROCESS VARIABILITY AWARE ADAPTIVE INSPECTION AND METROLOGY
- Publication number 20200096871
- Publication date Mar 26, 2020
- ASML NETHERLANDS B.V.
- Venugopal VELLANKI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROCESS WINDOW OPTIMIZER
- Publication number 20180330030
- Publication date Nov 15, 2018
- ASML NETHERLANDS B.V.
- Stefan HUNSCHE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESS VARIABILITY AWARE ADAPTIVE INSPECTION AND METROLOGY
- Publication number 20180031981
- Publication date Feb 1, 2018
- ASML NETHERLANDS B.V.
- Venugopal VELLANKI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and Method to Ensure Source and Image Stability
- Publication number 20120327383
- Publication date Dec 27, 2012
- ASML NETHERLANDS B.V.
- Yu Cao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Venugopal Vellanki

Person

Patents Grantslast 30 patents

Process window optimizer

Process variability aware adaptive inspection and metrology

Method for determining candidate patterns from set of patterns of a...

Process window optimizer

Method and system for pattern configuration

Process variability aware adaptive inspection and metrology

Process variability aware adaptive inspection and metrology

System and method to ensure source and image stability

Patents Applicationslast 30 patents

PROCESS WINDOW OPTIMIZER

APPARATUS FOR CLAMPING A SUBSTRATE ON A MONO-POLAR ELECTROSTATIC CH...

CHAMBER CLEAN FOR DRY DEVELOP OF METAL ORGANIC PHOTORESISTS

PROCESS WINDOW OPTIMIZER

METHOD FOR DETERMINING CANDIDATE PATTERNS FROM SET OF PATTERNS OF A...

PROCESS VARIABILITY AWARE ADAPTIVE INSPECTION AND METROLOGY

METHOD AND SYSTEM FOR PATTERN CONFIGURATION

PROCESS VARIABILITY AWARE ADAPTIVE INSPECTION AND METROLOGY

PROCESS WINDOW OPTIMIZER

PROCESS VARIABILITY AWARE ADAPTIVE INSPECTION AND METROLOGY

System and Method to Ensure Source and Image Stability