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Veronica McCarthy
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San Jose, CA, US
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last 30 patents
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Synchronization of precursor pulsing and wafer rotation
Publication number
20070252299
Publication date
Nov 1, 2007
APPLIED MATERIALS, INC.
Maitreyee Mahajani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...