TREA

Viacheslav Medvedev

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  • Moscow, RU
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Patents Grantslast 30 patents

  • Information Patent Grant

    Reflective optical element
    • Patent number 10,916,356
    • Issue date Feb 9, 2021
    • Carl Zeiss SMT GmbH
    • Dmitry Kuznetsov
    • G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
  • Information Patent Grant

    Source-collector device, lithographic apparatus, and device manufac...
    • Patent number 9,411,238
    • Issue date Aug 9, 2016
    • ASML Netherlands B.V.
    • Andrei Mikhailovich Yakunin
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Radiation source
    • Patent number 9,366,967
    • Issue date Jun 14, 2016
    • ASML Netherlands B.V.
    • Andrei Mikhailovich Yakunin
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Spectral purity filter
    • Patent number 9,007,565
    • Issue date Apr 14, 2015
    • ASML Netherlands B.V.
    • Andrei Mikhailovich Yakunin
    • G02 - OPTICS

Patents Applicationslast 30 patents