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Apparatus for sputter deposition
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Patent number 6,843,891
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Issue date Jan 18, 2005
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Kaufman & Robinson, Inc.
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James R. Kahn
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Hall-current ion source
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Patent number 6,750,600
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Issue date Jun 15, 2004
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Kaufman & Robinson, Inc.
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Harold R. Kaufman
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H01 - BASIC ELECTRIC ELEMENTS
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Apparatus for sputter deposition
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Patent number 6,682,634
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Issue date Jan 27, 2004
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Kaufman & Robinson, Inc.
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James R. Kahn
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Ion-assisted magnetron deposition
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Patent number 6,454,910
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Issue date Sep 24, 2002
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Kaufman & Robinson, Inc.
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Viacheslav V. Zhurin
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Closed drift hollow cathode
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Patent number 6,323,586
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Issue date Nov 27, 2001
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Front Range Fakel, Inc.
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Viacheslav V. Zhurin
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F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
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Ion assisted deposition source
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Patent number 6,238,537
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Issue date May 29, 2001
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Kaufman & Robinson, Inc.
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James R. Kahn
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...