Vibhu Jindal

Person

Albany, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
EUVL process structure fabrication methods
- Patent number 8,865,376
- Issue date Oct 21, 2014
- Sematech, Inc.
- Vibhu Jindal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating of shield surfaces in deposition systems
- Patent number 8,734,907
- Issue date May 27, 2014
- Sematech, Inc.
- Vibhu Jindal
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Process for cleaning shield surfaces in deposition systems
- Patent number 8,734,586
- Issue date May 27, 2014
- Sematech, Inc.
- Vibhu Jindal
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Tools, methods and devices for mitigating extreme ultraviolet optic...
- Patent number 8,399,868
- Issue date Mar 19, 2013
- Sematech Inc.
- Vibhu Jindal
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
EUVL PROCESS STRUCTURE FABRICATION METHODS
- Publication number 20140255828
- Publication date Sep 11, 2014
- Intel Corporation
- Vibhu JINDAL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Coating Of Shield Surfaces In Deposition Systems
- Publication number 20140242501
- Publication date Aug 28, 2014
- SEMATECH, INC.
- Vibhu Jindal
- B82 - NANO-TECHNOLOGY
Information Patent Application
Process For Cleaning Shield Surfaces In Deposition Systems
- Publication number 20140242500
- Publication date Aug 28, 2014
- SEMATECH, INC.
- Vibhu Jindal
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL) ALTERNATING PHASE SHIFT MASK
- Publication number 20140170533
- Publication date Jun 19, 2014
- SEMATECH, INC.
- Lei Sun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PLASMA SHIELD SURFACE PROTECTION
- Publication number 20140162465
- Publication date Jun 12, 2014
- Board of Trustees of the University of Illinois
- John R. SPORRE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR CLEANING SHIELD SURFACES IN DEPOSITION SYSTEMS
- Publication number 20130202991
- Publication date Aug 8, 2013
- Vibhu Jindal
- B82 - NANO-TECHNOLOGY
Information Patent Application
COATING OF SHIELD SURFACES IN DEPOSITION SYSTEMS
- Publication number 20130202990
- Publication date Aug 8, 2013
- Vibhu Jindal
- B82 - NANO-TECHNOLOGY
Information Patent Application
Tools, Methods and Devices for Mitigating Extreme Ultraviolet Optic...
- Publication number 20120205558
- Publication date Aug 16, 2012
- Vibhu Jindal
- B82 - NANO-TECHNOLOGY

Vibhu Jindal

Person

Patents Grantslast 30 patents

EUVL process structure fabrication methods

Coating of shield surfaces in deposition systems

Process for cleaning shield surfaces in deposition systems

Tools, methods and devices for mitigating extreme ultraviolet optic...

Patents Applicationslast 30 patents

EUVL PROCESS STRUCTURE FABRICATION METHODS

Coating Of Shield Surfaces In Deposition Systems

Process For Cleaning Shield Surfaces In Deposition Systems

EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL) ALTERNATING PHASE SHIFT MASK

PLASMA SHIELD SURFACE PROTECTION

PROCESS FOR CLEANING SHIELD SURFACES IN DEPOSITION SYSTEMS

COATING OF SHIELD SURFACES IN DEPOSITION SYSTEMS

Tools, Methods and Devices for Mitigating Extreme Ultraviolet Optic...