Victor M. Benveniste

Person

Lyle, WA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Inductively coupled RF plasma source with magnetic confinement and...
- Patent number 10,049,861
- Issue date Aug 14, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques and apparatus for manipulating an ion beam
- Patent number 9,793,087
- Issue date Oct 17, 2017
- Varian Semiconductor Equipment Associates, Inc.
- James S. Buff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma potential modulated ion implantation system
- Patent number 9,297,063
- Issue date Mar 29, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana B. Radovanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Excited gas injection for ion implant control
- Patent number 9,018,829
- Issue date Apr 28, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively coupled plasma flood gun using an immersed low inductan...
- Patent number 8,847,496
- Issue date Sep 30, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for manipulating an ion beam
- Patent number 8,604,443
- Issue date Dec 10, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excited gas injection for ion implant control
- Patent number 8,501,624
- Issue date Aug 6, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively coupled plasma flood gun using an immersed low inductan...
- Patent number 8,471,476
- Issue date Jun 25, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for improving extracted ion beam quality using high-tran...
- Patent number 8,466,431
- Issue date Jun 18, 2013
- Varian Semiconductor Equipment Associates, Inc.
- James S. Buff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for controlling the temperature of an RF ion source window
- Patent number 8,436,318
- Issue date May 7, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for providing a multimode ion source
- Patent number 8,357,912
- Issue date Jan 22, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mass analysis magnet for a ribbon beam
- Patent number 8,263,941
- Issue date Sep 11, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Victor Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled ion source
- Patent number 8,188,448
- Issue date May 29, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Victor Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled ion source
- Patent number 8,183,542
- Issue date May 22, 2012
- Varion Semiconductor Equipment Associates, Inc.
- Victor Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for controlling deflection of a charged particle...
- Patent number 8,129,695
- Issue date Mar 6, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Peter L. Kellerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogen ion implanter using a broad beam source
- Patent number 7,897,945
- Issue date Mar 1, 2011
- Twin Creeks Technologies, Inc.
- Thomas Parrill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for independently controlling deflection, deceleration a...
- Patent number 7,888,653
- Issue date Feb 15, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Peter L. Kellerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Implant uniformity control
- Patent number 7,820,988
- Issue date Oct 26, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for reducing magnetic fields at an implant location
- Patent number 7,807,983
- Issue date Oct 5, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Segmented resonant antenna for radio frequency inductively coupled...
- Patent number 7,748,344
- Issue date Jul 6, 2010
- Axcelis Technologies, Inc.
- William F. DiVergilio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for measuring ion beam emittance
- Patent number 7,723,705
- Issue date May 25, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for plasma injection
- Patent number 7,723,707
- Issue date May 25, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for providing a multimode ion source
- Patent number 7,700,925
- Issue date Apr 20, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for shaping a ribbon-shaped ion beam
- Patent number 7,675,047
- Issue date Mar 9, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana B. Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for improved ion beam transport
- Patent number 7,619,228
- Issue date Nov 17, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Victor Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multichannel ion gun
- Patent number 7,598,505
- Issue date Oct 6, 2009
- Axcelis Technologies, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for trapping ion beam particles and focusing an...
- Patent number 7,598,495
- Issue date Oct 6, 2009
- Axcelis Technologies, Inc.
- Peter L. Kellerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation with a collimator magnet and a neutral filter magnet
- Patent number 7,579,602
- Issue date Aug 25, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam scanning control methods and systems for ion implantation...
- Patent number 7,550,751
- Issue date Jun 23, 2009
- Axcelis Technologies, Inc.
- Victor M. Benveniste
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
System and method for performing SIMOX implants using an ion shower
- Patent number 7,421,973
- Issue date Sep 9, 2008
- Axcelis Technologies, Inc.
- Peter L. Kellerman
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TECHNIQUES AND APPARATUS FOR MANIPULATING AN ION BEAM
- Publication number 20170076908
- Publication date Mar 16, 2017
- Varian Semiconductor Equipment Associates, Inc.
- James S. Buff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRIPLE MODE ELECTROSTATIC COLLIMATOR
- Publication number 20160379799
- Publication date Dec 29, 2016
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUCTIVELY COUPLED RF PLASMA SOURCE WITH MAGNETIC CONFINEMENT AND...
- Publication number 20160071704
- Publication date Mar 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRIPLE MODE ELECTROSTATIC COLLIMATOR
- Publication number 20150144810
- Publication date May 28, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Frank Sinclair
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
INDUCTIVELY COUPLED PLASMA FLOOD GUN USING AN IMMERSED LOW INDUCTAN...
- Publication number 20130320854
- Publication date Dec 5, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXCITED GAS INJECTION FOR ION IMPLANT CONTROL
- Publication number 20130313443
- Publication date Nov 28, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Potential Modulated ION Implantation System
- Publication number 20130287964
- Publication date Oct 31, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana B. Radovanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INDUCTIVELY COUPLED RF PLASMA SOURCE WITH MAGNETIC CONFINEMENT AND...
- Publication number 20130015053
- Publication date Jan 17, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR PRODUCING A MASS ANALYZED ION BEAM FOR HIGH T...
- Publication number 20130001414
- Publication date Jan 3, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR PRODUCING A MASS ANALYZED ION BEAM
- Publication number 20120168622
- Publication date Jul 5, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUCTIVELY COUPLED PLASMA FLOOD GUN USING AN IMMERSED LOW INDUCTAN...
- Publication number 20120085917
- Publication date Apr 12, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR CONTROLLING THE TEMPERATURE OF AN RF ION SOURCE WINDOW
- Publication number 20110240876
- Publication date Oct 6, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROLLED ION SOURCE
- Publication number 20110240878
- Publication date Oct 6, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Victor Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROLLED ION SOURCE
- Publication number 20110240877
- Publication date Oct 6, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Victor Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR CONTROLLING DEFLECTION OF A CHARGED PARTICLE...
- Publication number 20110155921
- Publication date Jun 30, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Peter L. Kellerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR MANIPULATING AN ION BEAM
- Publication number 20110114849
- Publication date May 19, 2011
- VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES , INC.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR IMPROVING EXTRACTED ION BEAM QUALITY USING HIGH-TRAN...
- Publication number 20100200768
- Publication date Aug 12, 2010
- Varian Semiconductor Equipment Associates, Inc.
- JAMES BUFF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR INDEPENDENTLY CONTROLLING DEFLECTION, DECELERATION A...
- Publication number 20100171042
- Publication date Jul 8, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Peter L. KELLERMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR PROVIDING A MULTIMODE ION SOURCE
- Publication number 20100148088
- Publication date Jun 17, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXCITED GAS INJECTION FOR ION IMPLANT CONTROL
- Publication number 20100140077
- Publication date Jun 10, 2010
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASS ANALYSIS MAGNET FOR A RIBBON BEAM
- Publication number 20100116983
- Publication date May 13, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Victor Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPLANT UNIFORMITY CONTROL
- Publication number 20100084581
- Publication date Apr 8, 2010
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDROGEN ION IMPLANTER USING A BROAD BEAM SOURCE
- Publication number 20100072401
- Publication date Mar 25, 2010
- TWIN CREEKS TECHNOLOGIES, INC.
- Thomas Parrill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR MEASURING ION BEAM EMITTANCE
- Publication number 20090314932
- Publication date Dec 24, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR PROVIDING A MULTIMODE ION SOURCE
- Publication number 20090166554
- Publication date Jul 2, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR SHAPING AN ION BEAM
- Publication number 20090121149
- Publication date May 14, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR MEASURING AND CONTROLLING ION BEAM ANGLE AND DENSITY...
- Publication number 20090121122
- Publication date May 14, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Peter L. Kellerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR PLASMA INJECTION
- Publication number 20090026390
- Publication date Jan 29, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Technique for Reducing Magnetic Fields at an Implant Location
- Publication number 20080169426
- Publication date Jul 17, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION WITH A COLLIMATOR MAGNET AND A NEUTRAL FILTER MAGNET
- Publication number 20080149845
- Publication date Jun 26, 2008
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS

Victor M. Benveniste

Person

Patents Grantslast 30 patents

Inductively coupled RF plasma source with magnetic confinement and...

Techniques and apparatus for manipulating an ion beam

Plasma potential modulated ion implantation system

Excited gas injection for ion implant control

Inductively coupled plasma flood gun using an immersed low inductan...

System and method for manipulating an ion beam

Excited gas injection for ion implant control

Inductively coupled plasma flood gun using an immersed low inductan...

Techniques for improving extracted ion beam quality using high-tran...

Apparatus for controlling the temperature of an RF ion source window

Techniques for providing a multimode ion source

Mass analysis magnet for a ribbon beam

Temperature controlled ion source

Temperature controlled ion source

System and method for controlling deflection of a charged particle...

Hydrogen ion implanter using a broad beam source

Techniques for independently controlling deflection, deceleration a...

Implant uniformity control

Technique for reducing magnetic fields at an implant location

Segmented resonant antenna for radio frequency inductively coupled...

Techniques for measuring ion beam emittance

Techniques for plasma injection

Techniques for providing a multimode ion source

Technique for shaping a ribbon-shaped ion beam

Technique for improved ion beam transport

Multichannel ion gun

Methods and systems for trapping ion beam particles and focusing an...

Ion implantation with a collimator magnet and a neutral filter magnet

Ion beam scanning control methods and systems for ion implantation...

System and method for performing SIMOX implants using an ion shower

Patents Applicationslast 30 patents

TECHNIQUES AND APPARATUS FOR MANIPULATING AN ION BEAM

TRIPLE MODE ELECTROSTATIC COLLIMATOR

INDUCTIVELY COUPLED RF PLASMA SOURCE WITH MAGNETIC CONFINEMENT AND...

TRIPLE MODE ELECTROSTATIC COLLIMATOR

INDUCTIVELY COUPLED PLASMA FLOOD GUN USING AN IMMERSED LOW INDUCTAN...

EXCITED GAS INJECTION FOR ION IMPLANT CONTROL

Plasma Potential Modulated ION Implantation System

INDUCTIVELY COUPLED RF PLASMA SOURCE WITH MAGNETIC CONFINEMENT AND...

SYSTEM AND METHOD FOR PRODUCING A MASS ANALYZED ION BEAM FOR HIGH T...

SYSTEM AND METHOD FOR PRODUCING A MASS ANALYZED ION BEAM

INDUCTIVELY COUPLED PLASMA FLOOD GUN USING AN IMMERSED LOW INDUCTAN...

APPARATUS FOR CONTROLLING THE TEMPERATURE OF AN RF ION SOURCE WINDOW

TEMPERATURE CONTROLLED ION SOURCE

TEMPERATURE CONTROLLED ION SOURCE

SYSTEM AND METHOD FOR CONTROLLING DEFLECTION OF A CHARGED PARTICLE...

SYSTEM AND METHOD FOR MANIPULATING AN ION BEAM

TECHNIQUES FOR IMPROVING EXTRACTED ION BEAM QUALITY USING HIGH-TRAN...

TECHNIQUES FOR INDEPENDENTLY CONTROLLING DEFLECTION, DECELERATION A...

TECHNIQUES FOR PROVIDING A MULTIMODE ION SOURCE

EXCITED GAS INJECTION FOR ION IMPLANT CONTROL

MASS ANALYSIS MAGNET FOR A RIBBON BEAM

IMPLANT UNIFORMITY CONTROL

HYDROGEN ION IMPLANTER USING A BROAD BEAM SOURCE

TECHNIQUES FOR MEASURING ION BEAM EMITTANCE

TECHNIQUES FOR PROVIDING A MULTIMODE ION SOURCE

TECHNIQUES FOR SHAPING AN ION BEAM

TECHNIQUES FOR MEASURING AND CONTROLLING ION BEAM ANGLE AND DENSITY...

TECHNIQUES FOR PLASMA INJECTION

Technique for Reducing Magnetic Fields at an Implant Location

ION IMPLANTATION WITH A COLLIMATOR MAGNET AND A NEUTRAL FILTER MAGNET