Victor Y. Lu

Person

Foster City, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Fabrication method of metal-free SOI wafer
- Patent number 12,040,221
- Issue date Jul 16, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Hung Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and method for manufacturing the same
- Patent number 11,508,670
- Issue date Nov 22, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Pu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning device for cleaning electroplating substrate holder
- Patent number 11,433,440
- Issue date Sep 6, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Young Wang
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Fabrication method of metal-free SOI wafer
- Patent number 11,232,974
- Issue date Jan 25, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Hung Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and method for embedded gettering in a silicon on insulat...
- Patent number 11,211,259
- Issue date Dec 28, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Pu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra high vacuum cryogenic pumping apparatus with nanostructure ma...
- Patent number 11,111,910
- Issue date Sep 7, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Surendra Babu Anantharaman
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Method for forming semiconductor device structure with etch stop layer
- Patent number 10,811,263
- Issue date Oct 20, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ya-Ling Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster tool techniques with improved efficiency
- Patent number 10,755,953
- Issue date Aug 25, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Su-Horng Lin
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor structure and method for manufacturing the same
- Patent number 10,714,433
- Issue date Jul 14, 2020
- Taiwan Semiconductor Manufacturing Company Ltd.
- Pu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming semiconductor device structure with etch stop layer
- Patent number 10,522,360
- Issue date Dec 31, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ya-Ling Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster tool techniques with improved efficiency
- Patent number 10,510,566
- Issue date Dec 17, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Su-Horng Lin
- C30 - CRYSTAL GROWTH
Information Patent Grant
Cleaning device for cleaning electroplating substrate holder
- Patent number 10,307,798
- Issue date Jun 4, 2019
- TAIWAN SEMICONDUCTER MANUFACTURING COMPANY LIMITED
- Yu-Young Wang
- B08 - CLEANING
Information Patent Grant
CVD metal seed layer
- Patent number 10,276,397
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ya-Ling Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for manufacturing a semiconductor structure
- Patent number 10,269,573
- Issue date Apr 23, 2019
- Taiwan Semiconductor Manufacturing Company Ltd.
- Kun-Mo Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate and manufacturing method of the same
- Patent number 10,170,312
- Issue date Jan 1, 2019
- Taiwan Semiconductor Manufacturing Company Ltd.
- Pu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 10,157,819
- Issue date Dec 18, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Pu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra high vacuum cryogenic pumping apparatus with nanostructure ma...
- Patent number 10,145,371
- Issue date Dec 4, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Surendra Babu Anantharaman
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Semiconductor structure having low-k spacer and method of manufactu...
- Patent number 10,020,198
- Issue date Jul 10, 2018
- Taiwan Semiconductor Manufacturing Company Ltd.
- Shiang-Bau Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor structure
- Patent number 10,002,780
- Issue date Jun 19, 2018
- Taiwan Semiconductor Manufacturing Company Ltd.
- Su-Horng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having a through-silicon via and manufacturing...
- Patent number 9,899,297
- Issue date Feb 20, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Pu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Intelligent metrology based on module knowledge
- Patent number 9,824,940
- Issue date Nov 21, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shiang-Bau Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cobalt interconnect techniques
- Patent number 9,472,502
- Issue date Oct 18, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ya-Ling Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CVD flowable gap fill
- Patent number 9,257,302
- Issue date Feb 9, 2016
- Novellus Systems, Inc.
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Antireflective coatings for via fill and photolithography applicati...
- Patent number 8,992,806
- Issue date Mar 31, 2015
- Honeywell International Inc.
- Bo Li
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method for reducing stress in porous dielectric films
- Patent number 8,889,233
- Issue date Nov 18, 2014
- Novellus Systems, Inc.
- Maxim Kelman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion-induced atomic layer deposition of tantalum
- Patent number 8,747,964
- Issue date Jun 10, 2014
- Novellus Systems, Inc.
- Kie Jin Park
- B82 - NANO-TECHNOLOGY
Information Patent Grant
CVD flowable gap fill
- Patent number 8,187,951
- Issue date May 29, 2012
- Novellus Systems, Inc.
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Antireflective coatings for via fill and photolithography applicati...
- Patent number 8,053,159
- Issue date Nov 8, 2011
- Honeywell International Inc.
- Bo Li
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Repair and restoration of damaged dielectric materials and films
- Patent number 7,915,181
- Issue date Mar 29, 2011
- Honeywell International Inc.
- Wenya Fan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Density gradient-free gap fill
- Patent number 7,888,273
- Issue date Feb 15, 2011
- Novellus Systems, Inc.
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FABRICATION METHOD OF METAL-FREE SOI WAFER
- Publication number 20240347377
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Hung Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING DEVICE FOR CLEANING ELECTROPLATING SUBSTRATE HOLDER
- Publication number 20220379356
- Publication date Dec 1, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Yu-Young WANG
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
FABRICATION METHOD OF METAL-FREE SOI WAFER
- Publication number 20220139769
- Publication date May 5, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Hung Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Structure and Method for Embedded Gettering in a Silicon On Insulat...
- Publication number 20220122849
- Publication date Apr 21, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Pu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20200303324
- Publication date Sep 24, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- PU-FANG CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FABRICATION METHOD OF METAL-FREE SOI WAFER
- Publication number 20200176306
- Publication date Jun 4, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Yu-Hung Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE WITH ETCH STOP LAYER
- Publication number 20200144063
- Publication date May 7, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ya-Ling LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLUSTER TOOL TECHNIQUES WITH IMPROVED EFFICIENCY
- Publication number 20200051837
- Publication date Feb 13, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Su-Horng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20190355670
- Publication date Nov 21, 2019
- Taiwan Semiconductor Manufacturing company Ltd.
- PU-FANG CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Structure and Method for Embedded Gettering in a Silicon On Insulat...
- Publication number 20190326128
- Publication date Oct 24, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Pu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING DEVICE FOR CLEANING ELECTROPLATING SUBSTRATE HOLDER
- Publication number 20190283087
- Publication date Sep 19, 2019
- Taiwan Semiconductor Manufacturing Company Limited
- Yu-Young WANG
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ULTRA HIGH VACUUM CRYOGENIC PUMPING APPARATUS WITH NANOSTRUCTURE MA...
- Publication number 20190101110
- Publication date Apr 4, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Surendra Babu Anantharaman
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
SEMICONDUCTOR SUBSTRATE AND MANUFACTURING METHOD OF THE SAME
- Publication number 20180308697
- Publication date Oct 25, 2018
- Taiwan Semiconductor Manufacturing company Ltd.
- PU-FANG CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE HAVING LOW-K SPACER AND METHOD OF MANUFACTU...
- Publication number 20180174846
- Publication date Jun 21, 2018
- Taiwan Semiconductor Manufacturing company Ltd.
- Shiang-Bau WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE WITH ETCH STOP LAYER
- Publication number 20180166285
- Publication date Jun 14, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ya-Ling LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20180096914
- Publication date Apr 5, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Pu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR STRUCTURE
- Publication number 20170338138
- Publication date Nov 23, 2017
- Taiwan Semiconductor Manufacturing company Ltd.
- SU-HORNG LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTELLIGENT METROLOGY BASED ON MODULE KNOWLEDGE
- Publication number 20170092548
- Publication date Mar 30, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Shiang-Bau Wang
- G01 - MEASURING TESTING
Information Patent Application
CLEANING DEVICE FOR CLEANING ELECTROPLATING SUBSTRATE HOLDER
- Publication number 20170056934
- Publication date Mar 2, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Young WANG
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
CLUSTER TOOL TECHNIQUES WITH IMPROVED EFFICIENCY
- Publication number 20170018443
- Publication date Jan 19, 2017
- Taiwan Semiconductor Manufactring Co., Ltd.
- Su-Horng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CVD METAL SEED LAYER
- Publication number 20170005038
- Publication date Jan 5, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Ya-Ling Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR MANUFACTURING A SEMICONDUCTOR STRUCTURE
- Publication number 20150279632
- Publication date Oct 1, 2015
- Taiwan Semiconductor Manufacturing company Ltd.
- KUN-MO LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ultra High Vacuum Cryogenic Pumping Apparatus with Nanostructure Ma...
- Publication number 20150107273
- Publication date Apr 23, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Surendra Babu Anantharaman
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
ION-INDUCED ATOMIC LAYER DEPOSITION OF TANTALUM
- Publication number 20120115325
- Publication date May 10, 2012
- Kie Jin PARK
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD OF MITIGATING SUBSTRATE DAMAGE DURING DEPOSITION PROCESSES
- Publication number 20120083134
- Publication date Apr 5, 2012
- Hui-Jung WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Antireflective Coatings for Via Fill and Photolithography Applicati...
- Publication number 20120001135
- Publication date Jan 5, 2012
- Bo Li
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Repair and restoration of damaged dielectric materials and films
- Publication number 20060141641
- Publication date Jun 29, 2006
- Wenya Fan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrical properties of shallow trench isolation materials via hig...
- Publication number 20060051929
- Publication date Mar 9, 2006
- Honeywell International Inc.
- Lei Jin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low temperature curable materials for optical applications
- Publication number 20060035419
- Publication date Feb 16, 2006
- Victor Lu
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
LOW TEMPERATURE CURABLE MATERIALS FOR OPTICAL APPLICATIONS
- Publication number 20060027803
- Publication date Feb 9, 2006
- Honeywell International, Inc.
- Victor Lu
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...

Victor Y. Lu

Person

Patents Grantslast 30 patents

Fabrication method of metal-free SOI wafer

Semiconductor structure and method for manufacturing the same

Cleaning device for cleaning electroplating substrate holder

Fabrication method of metal-free SOI wafer

Structure and method for embedded gettering in a silicon on insulat...

Ultra high vacuum cryogenic pumping apparatus with nanostructure ma...

Method for forming semiconductor device structure with etch stop layer

Cluster tool techniques with improved efficiency

Semiconductor structure and method for manufacturing the same

Method for forming semiconductor device structure with etch stop layer

Cluster tool techniques with improved efficiency

Cleaning device for cleaning electroplating substrate holder

CVD metal seed layer

Device and method for manufacturing a semiconductor structure

Semiconductor substrate and manufacturing method of the same

Semiconductor device and manufacturing method thereof

Ultra high vacuum cryogenic pumping apparatus with nanostructure ma...

Semiconductor structure having low-k spacer and method of manufactu...

Method of manufacturing a semiconductor structure

Semiconductor device having a through-silicon via and manufacturing...

Intelligent metrology based on module knowledge

Cobalt interconnect techniques

CVD flowable gap fill

Antireflective coatings for via fill and photolithography applicati...

Method for reducing stress in porous dielectric films

Ion-induced atomic layer deposition of tantalum

CVD flowable gap fill

Antireflective coatings for via fill and photolithography applicati...

Repair and restoration of damaged dielectric materials and films

Density gradient-free gap fill

Patents Applicationslast 30 patents

FABRICATION METHOD OF METAL-FREE SOI WAFER

CLEANING DEVICE FOR CLEANING ELECTROPLATING SUBSTRATE HOLDER

FABRICATION METHOD OF METAL-FREE SOI WAFER

Structure and Method for Embedded Gettering in a Silicon On Insulat...

SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

FABRICATION METHOD OF METAL-FREE SOI WAFER

METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE WITH ETCH STOP LAYER

CLUSTER TOOL TECHNIQUES WITH IMPROVED EFFICIENCY

SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

Structure and Method for Embedded Gettering in a Silicon On Insulat...

CLEANING DEVICE FOR CLEANING ELECTROPLATING SUBSTRATE HOLDER

ULTRA HIGH VACUUM CRYOGENIC PUMPING APPARATUS WITH NANOSTRUCTURE MA...

SEMICONDUCTOR SUBSTRATE AND MANUFACTURING METHOD OF THE SAME

SEMICONDUCTOR STRUCTURE HAVING LOW-K SPACER AND METHOD OF MANUFACTU...

METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE WITH ETCH STOP LAYER

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

METHOD OF MANUFACTURING A SEMICONDUCTOR STRUCTURE

INTELLIGENT METROLOGY BASED ON MODULE KNOWLEDGE

CLEANING DEVICE FOR CLEANING ELECTROPLATING SUBSTRATE HOLDER

CLUSTER TOOL TECHNIQUES WITH IMPROVED EFFICIENCY

CVD METAL SEED LAYER

DEVICE AND METHOD FOR MANUFACTURING A SEMICONDUCTOR STRUCTURE

Ultra High Vacuum Cryogenic Pumping Apparatus with Nanostructure Ma...

ION-INDUCED ATOMIC LAYER DEPOSITION OF TANTALUM

METHOD OF MITIGATING SUBSTRATE DAMAGE DURING DEPOSITION PROCESSES

Antireflective Coatings for Via Fill and Photolithography Applicati...

Repair and restoration of damaged dielectric materials and films

Electrical properties of shallow trench isolation materials via hig...

Low temperature curable materials for optical applications

LOW TEMPERATURE CURABLE MATERIALS FOR OPTICAL APPLICATIONS