Victoria M. Chaplick

Person

Sherborn, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for processing substrate edges
- Patent number 8,658,937
- Issue date Feb 25, 2014
- UVTech Systems, Inc.
- Kenneth J. Harte
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Fiber-optic beam delivery system for wafer edge processing
- Patent number 8,415,587
- Issue date Apr 9, 2013
- UVTech Systems, Inc.
- Ronald P. Millman
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for processing substrate edges
- Patent number 8,410,394
- Issue date Apr 2, 2013
- UVTech Systems, Inc.
- Ronald P. Millman
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Orthogonal beam delivery system for wafer edge processing
- Patent number 8,183,500
- Issue date May 22, 2012
- UVTech Systems, Inc.
- Kenneth J. Harte
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Laser doping
- Publication number 20110185971
- Publication date Aug 4, 2011
- UVTech Systems, Inc.
- David J. Elliott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING SUBSTRATE EDGES
- Publication number 20110168672
- Publication date Jul 14, 2011
- UVTech Systems, Inc.
- Kenneth J. Harte
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MODULAR APPARATUS FOR WAFER EDGE PROCESSING
- Publication number 20110147350
- Publication date Jun 23, 2011
- UVTech Systems Inc.
- Ronald P. Millman, JR.
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ORTHOGONAL BEAM DELIVERY SYSTEM FOR WAFER EDGE PROCESSING
- Publication number 20110147352
- Publication date Jun 23, 2011
- UVTech Systems Inc.
- Kenneth J. Harte
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING SUBSTRATE EDGES
- Publication number 20110139757
- Publication date Jun 16, 2011
- Ronald P. Millman, JR.
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
FIBER-OPTIC BEAM DELIVERY SYSTEM FOR WAFER EDGE PROCESSING
- Publication number 20110139759
- Publication date Jun 16, 2011
- UVTech Systems Inc.
- Ronald P. Millman, JR.
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Photoreactive Removal of Ion Implanted Resist
- Publication number 20110061679
- Publication date Mar 17, 2011
- UVTech Systems, Inc.
- David J. Elliott
- B08 - CLEANING
Information Patent Application
LASER OPTICAL SYSTEM
- Publication number 20090323739
- Publication date Dec 31, 2009
- UV TECH SYSTEMS
- David J. Elliott
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and apparatus for laser oxidation and reduction
- Publication number 20080299780
- Publication date Dec 4, 2008
- UV Tech Systems, Inc.
- David J. Elliott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser optical system
- Publication number 20080151951
- Publication date Jun 26, 2008
- David J. Elliott
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and apparatus for delivery of pulsed laser radiation
- Publication number 20070224768
- Publication date Sep 27, 2007
- UVTech Systems, Inc.
- Victoria M. Chaplick
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Photoreactive removal of ion implanted resist
- Publication number 20070054492
- Publication date Mar 8, 2007
- David J. Elliott
- H01 - BASIC ELECTRIC ELEMENTS

Victoria M. Chaplick

Person

Patents Grantslast 30 patents

Method and apparatus for processing substrate edges

Fiber-optic beam delivery system for wafer edge processing

Method and apparatus for processing substrate edges

Orthogonal beam delivery system for wafer edge processing

Patents Applicationslast 30 patents

Laser doping

METHOD AND APPARATUS FOR PROCESSING SUBSTRATE EDGES

MODULAR APPARATUS FOR WAFER EDGE PROCESSING

ORTHOGONAL BEAM DELIVERY SYSTEM FOR WAFER EDGE PROCESSING

METHOD AND APPARATUS FOR PROCESSING SUBSTRATE EDGES

FIBER-OPTIC BEAM DELIVERY SYSTEM FOR WAFER EDGE PROCESSING

Photoreactive Removal of Ion Implanted Resist

LASER OPTICAL SYSTEM

Method and apparatus for laser oxidation and reduction

Laser optical system

Method and apparatus for delivery of pulsed laser radiation

Photoreactive removal of ion implanted resist