VIDHYA CHAKRAPANI

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GUILDERLAND, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Etch process for reducing directed self assembly pattern defectivit...
- Patent number 9,153,457
- Issue date Oct 6, 2015
- Tokyo Electron Limited
- Vidhya Chakrapani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etch process for reducing directed self assembly pattern defectivity
- Patent number 8,945,408
- Issue date Feb 3, 2015
- Tokyo Electron Limited
- Vidhya Chakrapani
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCH PROCESS FOR REDUCING DIRECTED SELF ASSEMBLY PATTERN DEFECTIVITY
- Publication number 20140370717
- Publication date Dec 18, 2014
- TOKYO ELECTRON LIMITED
- VIDHYA CHAKRAPANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ETCH PROCESS FOR REDUCING DIRECTED SELF ASSEMBLY PATTERN DEFECTIVIT...
- Publication number 20140370718
- Publication date Dec 18, 2014
- TOKYO ELECTRON LIMITED
- VIDHYA CHAKRAPANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY