Vidya Ramanathan

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Milpitas, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Analyzing root causes of process variation in scatterometry metrology
- Patent number 10,203,200
- Issue date Feb 12, 2019
- KLA-Tencor Corporation
- Tal Marciano
- G01 - MEASURING TESTING
Information Patent Grant
Feed forward of metrology data in a metrology system
- Patent number 9,903,711
- Issue date Feb 27, 2018
- KLA-Tencor Corporation
- Ady Levy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Analyzing Root Causes of Process Variation in Scatterometry Metrology
- Publication number 20180023950
- Publication date Jan 25, 2018
- KLA-Tencor Corporation
- Tal Marciano
- G01 - MEASURING TESTING
Information Patent Application
Feed Forward of Metrology Data in a Metrology System
- Publication number 20160290796
- Publication date Oct 6, 2016
- KLA-Tencor Corporation
- Ady Levy
- G01 - MEASURING TESTING