Vidya Vaenkatesan

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Guided patterning device inspection
- Patent number 11,287,748
- Issue date Mar 29, 2022
- ASML Netherlands B.V.
- Anton Bernhard Van Oosten
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
- Patent number 8,233,155
- Issue date Jul 31, 2012
- ASML Netherlands B.V.
- Antoine Gaston Marie Kiers
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
GUIDED PATTERNING DEVICE INSPECTION
- Publication number 20210041788
- Publication date Feb 11, 2021
- ASML NETHERLANDS B.V.
- Anton Bernhard VAN OOSTEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Inspection method and apparatus, lithographic apparatus, lithograph...
- Publication number 20080088854
- Publication date Apr 17, 2008
- ASML NETHERLANDS B.V.
- Antoine Gaston Marie Kiers
- G01 - MEASURING TESTING