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Vijay Venugopal
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Gloucester, MA, US
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last 30 patents
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Patent Grant
Techniques for controlling precursors in chemical deposition processes
Patent number
10,822,699
Issue date
Nov 3, 2020
Varian Semiconductor Equipment Associates, Inc.
Elaina Babayan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
TECHNIQUES FOR CONTROLLING PRECURSORS IN CHEMICAL DEPOSITION PROCESSES
Publication number
20200399758
Publication date
Dec 24, 2020
Varian Semiconductor Equipment Associates, Inc.
Elaina Babayan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TECHNIQUES FOR CONTROLLING PRECURSORS IN CHEMICAL DEPOSITION PROCESSES
Publication number
20190203358
Publication date
Jul 4, 2019
Applied Materials, Inc.
Elaina Babayan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...