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Vikas R. Sheth
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Austin, TX, US
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last 30 patents
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Patent Grant
Treatment for reduction of line edge roughness
Patent number
7,670,760
Issue date
Mar 2, 2010
FREESCALE SEMICONDUCTOR, INC.
Jinmiao James Shen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Plasma treatment for surface of semiconductor device
Patent number
7,176,130
Issue date
Feb 13, 2007
FREESCALE SEMICONDUCTOR, INC.
Jin Miao Shen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SEMICONDUCTOR DEVICE STRUCTURES AND METHODS FOR COPPER BOND PADS
Publication number
20140061910
Publication date
Mar 6, 2014
CHU-CHUNG LEE
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Treatment for reduction of line edge roughness
Publication number
20070207404
Publication date
Sep 6, 2007
Freescale Semiconductor, Inc.
Jinmiao James Shen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Plasma treatment for surface of semiconductor device
Publication number
20060105568
Publication date
May 18, 2006
Jin Miao Shen
H01 - BASIC ELECTRIC ELEMENTS