Vikram Tolani

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
System and method for reducing printable defects on extreme ultravi...
- Patent number 11,119,404
- Issue date Sep 14, 2021
- KLA Corporation
- Xiaochun Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dispositioning defects detected on extreme ultraviolet photomasks
- Patent number 10,866,197
- Issue date Dec 15, 2020
- KLA Corp.
- Vikram Tolani
- G01 - MEASURING TESTING
Information Patent Grant
Photo-mask acceptance technique
- Patent number 8,458,622
- Issue date Jun 4, 2013
- Luminescent Technologies, Inc.
- Linyong Pang
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
FAST AND FUZZY PATTERN GROUPING
- Publication number 20230013051
- Publication date Jan 19, 2023
- KLA Corporation
- Kangjia Liao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR REDUCING PRINTABLE DEFECTS ON EXTREME ULTRAVI...
- Publication number 20210109440
- Publication date Apr 15, 2021
- KLA Corporation
- Xiaochun Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DISPOSITIONING DEFECTS DETECTED ON EXTREME ULTRAVIOLET PHOTOMASKS
- Publication number 20200096862
- Publication date Mar 26, 2020
- KLA Corporation
- Vikram Tolani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Photo-Mask Acceptance Technique
- Publication number 20120134542
- Publication date May 31, 2012
- Linyong Pang
- G06 - COMPUTING CALCULATING COUNTING