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Ville S. Kiiskinen
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Newburgh, NY, US
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last 30 patents
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Patent Grant
Dry etch process to edit copper lines
Patent number
6,900,137
Issue date
May 31, 2005
International Business Machines Corporation
Steven B. Herschbein
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
DRY ETCH PROCESS TO EDIT COPPER LINES
Publication number
20040188380
Publication date
Sep 30, 2004
International Business Machines Corporation
Steven B. Herschbein
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...