Vinay Pohray

Person

  • Pleasanton, CA, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Wiggling control for pseudo-hardmask

    • Patent number 8,470,126
    • Issue date Jun 25, 2013
    • Lam Research Corporation
    • Ben-Li Sheu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wiggling control for pseudo-hardmask

    • Patent number 8,304,262
    • Issue date Nov 6, 2012
    • Lam Research Corporation
    • Ben-Li Sheu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Lag control

    • Patent number 7,789,991
    • Issue date Sep 7, 2010
    • Lam Research Corporation
    • Binet A. Worsham
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Lag control

    • Patent number 7,307,025
    • Issue date Dec 11, 2007
    • Lam Research Corporation
    • Binet A. Worsham
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Trench etch process for low-k dielectrics

    • Patent number 6,909,195
    • Issue date Jun 21, 2005
    • Lam Research Corporation
    • SiYi Li
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method for patterning multilevel interconnects

    • Patent number 6,875,699
    • Issue date Apr 5, 2005
    • Lam Research Corporation
    • Stephan Lassig
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Trench etch process for low-k dielectrics

    • Patent number 6,794,293
    • Issue date Sep 21, 2004
    • Lam Research Corporation
    • SiYi Li
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents