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Vinay Pohray
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Pleasanton, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Wiggling control for pseudo-hardmask
Patent number
8,470,126
Issue date
Jun 25, 2013
Lam Research Corporation
Ben-Li Sheu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wiggling control for pseudo-hardmask
Patent number
8,304,262
Issue date
Nov 6, 2012
Lam Research Corporation
Ben-Li Sheu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lag control
Patent number
7,789,991
Issue date
Sep 7, 2010
Lam Research Corporation
Binet A. Worsham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lag control
Patent number
7,307,025
Issue date
Dec 11, 2007
Lam Research Corporation
Binet A. Worsham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Trench etch process for low-k dielectrics
Patent number
6,909,195
Issue date
Jun 21, 2005
Lam Research Corporation
SiYi Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for patterning multilevel interconnects
Patent number
6,875,699
Issue date
Apr 5, 2005
Lam Research Corporation
Stephan Lassig
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Trench etch process for low-k dielectrics
Patent number
6,794,293
Issue date
Sep 21, 2004
Lam Research Corporation
SiYi Li
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
WIGGLING CONTROL FOR PSEUDO-HARDMASK
Publication number
20130020026
Publication date
Jan 24, 2013
LAM RESEARCH CORPORATION
Ben-Li Sheu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WIGGLING CONTROL FOR PSEUDO-HARDMASK
Publication number
20120214310
Publication date
Aug 23, 2012
LAM RESEARCH CORPORATION
Ben-Li Sheu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Trench etch process for low-k dielectrics
Publication number
20050009324
Publication date
Jan 13, 2005
LAM RESEARCH CORPORATION
SiYi Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRENCH ETCH PROCESS FOR LOW-K DIELECTRICS
Publication number
20040038540
Publication date
Feb 26, 2004
LAM RESEARCH CORPORATION
SiYi Li
H01 - BASIC ELECTRIC ELEMENTS