Vinayak Rastogi

Person

Albany, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for cyclic etching of a patterned layer
- Patent number 10,971,373
- Issue date Apr 6, 2021
- Tokyo Electron Limited
- Alok Ranjan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cyclic plasma etching of organic film using sulfur-based...
- Patent number 10,541,146
- Issue date Jan 21, 2020
- Tokyo Electron Limited
- Vinayak Rastogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cyclic plasma etching of organic film using carbon-based...
- Patent number 10,535,531
- Issue date Jan 14, 2020
- Tokyo Electron Limited
- Vinayak Rastogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of selective silicon nitride etching
- Patent number 10,381,235
- Issue date Aug 13, 2019
- Tokyo Electron Limited
- Alok Ranjan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for cyclic etching of a patterned layer
- Patent number 10,366,902
- Issue date Jul 30, 2019
- Tokyo Electron Limited
- Alok Ranjan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defectivity metrology during DSA patterning
- Patent number 9,947,597
- Issue date Apr 17, 2018
- Tokyo Electron Limited
- Vinayak Rastogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for selectivity enhancement during dry plasma etching
- Patent number 9,666,447
- Issue date May 30, 2017
- Tokyo Electron Limited
- Vinayak Rastogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for roughness improvement and selectivity enhancement during...
- Patent number 9,607,843
- Issue date Mar 28, 2017
- Tokyo Electron Limited
- Vinayak Rastogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Partial etch memorization via flash addition
- Patent number 9,576,812
- Issue date Feb 21, 2017
- Tokyo Electron Limited
- Elliott Franke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for roughness improvement and selectivity enhancement during...
- Patent number 9,576,816
- Issue date Feb 21, 2017
- Tokyo Electron Limited
- Vinayak Rastogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for roughness improvement and selectivity enhancement during...
- Patent number 9,530,667
- Issue date Dec 27, 2016
- Tokyo Electron Limited
- Vinayak Rastogi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR CYCLIC ETCHING OF A PATTERNED LAYER
- Publication number 20190304798
- Publication date Oct 3, 2019
- TOKYO ELECTRON LIMITED
- Alok Ranjan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CYCLIC PLASMA ETCHING OF ORGANIC FILM USING CARBON-BASED...
- Publication number 20180315616
- Publication date Nov 1, 2018
- TOKYO ELECTRON LIMITED
- Vinayak Rastogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CYCLIC PLASMA ETCHING OF ORGANIC FILM USING SULFUR-BASED...
- Publication number 20180315615
- Publication date Nov 1, 2018
- TOKYO ELECTRON LIMITED
- Vinayak Rastogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ANISOTROPIC DRY ETCHING OF TITANIUM-CONTAINING FILMS
- Publication number 20180294168
- Publication date Oct 11, 2018
- TOKYO ELECTRON LIMITED
- Kandabara N. Tapily
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF SELECTIVE SILICON OXIDE ETCHING
- Publication number 20170345673
- Publication date Nov 30, 2017
- TOKYO ELECTRON LIMITED
- Alok Ranjan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF SELECTIVE SILICON NITRIDE ETCHING
- Publication number 20170345674
- Publication date Nov 30, 2017
- TOKYO ELECTRON LIMITED
- Alok Ranjan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Defectivity Metrology During DSA Patterning
- Publication number 20170287790
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Vinayak Rastogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR CYCLIC ETCHING OF A PATTERNED LAYER
- Publication number 20170243757
- Publication date Aug 24, 2017
- TOKYO ELECTRON LIMITED
- Alok Ranjan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTIAL ETCH MEMORIZATION VIA FLASH ADDITION
- Publication number 20160293435
- Publication date Oct 6, 2016
- TOKYO ELECTRON LIMITED
- Elliott Franke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ROUGHNESS IMPROVEMENT AND SELECTIVITY ENHANCEMENT DURING...
- Publication number 20160240388
- Publication date Aug 18, 2016
- TOKYO ELECTRON LIMITED
- Vinayak Rastogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ROUGHNESS IMPROVEMENT AND SELECTIVITY ENHANCEMENT DURING...
- Publication number 20160240383
- Publication date Aug 18, 2016
- TOKYO ELECTRON LIMITED
- Vinayak Rastogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ROUGHNESS IMPROVEMENT AND SELECTIVITY ENHANCEMENT DURING...
- Publication number 20160240384
- Publication date Aug 18, 2016
- TOKYO ELECTRON LIMITED
- Vinayak Rastogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR SELECTIVITY ENHANCEMENT DURING DRY PLASMA ETCHING
- Publication number 20160118256
- Publication date Apr 28, 2016
- TOKYO ELECTRON LIMITED
- Vinayak Rastogi
- H01 - BASIC ELECTRIC ELEMENTS

Vinayak Rastogi

Person

Patents Grantslast 30 patents

Methods for cyclic etching of a patterned layer

Method of cyclic plasma etching of organic film using sulfur-based...

Method of cyclic plasma etching of organic film using carbon-based...

Method of selective silicon nitride etching

Methods for cyclic etching of a patterned layer

Defectivity metrology during DSA patterning

Method for selectivity enhancement during dry plasma etching

Method for roughness improvement and selectivity enhancement during...

Partial etch memorization via flash addition

Method for roughness improvement and selectivity enhancement during...

Method for roughness improvement and selectivity enhancement during...

Patents Applicationslast 30 patents

METHODS FOR CYCLIC ETCHING OF A PATTERNED LAYER

METHOD OF CYCLIC PLASMA ETCHING OF ORGANIC FILM USING CARBON-BASED...

METHOD OF CYCLIC PLASMA ETCHING OF ORGANIC FILM USING SULFUR-BASED...

METHOD FOR ANISOTROPIC DRY ETCHING OF TITANIUM-CONTAINING FILMS

METHOD OF SELECTIVE SILICON OXIDE ETCHING

METHOD OF SELECTIVE SILICON NITRIDE ETCHING

Defectivity Metrology During DSA Patterning

METHODS FOR CYCLIC ETCHING OF A PATTERNED LAYER

PARTIAL ETCH MEMORIZATION VIA FLASH ADDITION

METHOD FOR ROUGHNESS IMPROVEMENT AND SELECTIVITY ENHANCEMENT DURING...

METHOD FOR ROUGHNESS IMPROVEMENT AND SELECTIVITY ENHANCEMENT DURING...

METHOD FOR ROUGHNESS IMPROVEMENT AND SELECTIVITY ENHANCEMENT DURING...

METHOD FOR SELECTIVITY ENHANCEMENT DURING DRY PLASMA ETCHING