Vinayak Veer VATS

Person

San Ramon, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-region diffusion barrier containing titanium, silicon and nit...
- Patent number 11,942,365
- Issue date Mar 26, 2024
- Eugenus, Inc.
- Vinayak Veer Vats
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
TiSiN coating method
- Patent number 11,401,607
- Issue date Aug 2, 2022
- Eugenus, Inc.
- Vinayak Veer Vats
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-layer deposition and treatment of silicon nitride films
- Patent number 11,276,570
- Issue date Mar 15, 2022
- Applied Materials, Inc.
- Vinayak Veer Vats
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential deposition and high frequency plasma treatment of deposi...
- Patent number 11,217,443
- Issue date Jan 4, 2022
- Applied Materials, Inc.
- Vinayak Veer Vats
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process development visualization tool
- Patent number 11,157,661
- Issue date Oct 26, 2021
- Applied Materials, Inc.
- Vinayak Veer Vats
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pulsed plasma deposition etch step coverage improvement
- Patent number 10,950,430
- Issue date Mar 16, 2021
- Applied Materials, Inc.
- Vinayak Veer Vats
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI-REGION DIFFUSION BARRIER CONTAINING TITANIUM, SILICON AND NIT...
- Publication number 20250087534
- Publication date Mar 13, 2025
- EUGENUS, INC.
- Vinayak Veer Vats
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOPED SILICON-CONTAINING MATERIALS WITH INCREASED ELECTRICAL, MECHA...
- Publication number 20240332000
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TISIN COATING METHOD
- Publication number 20230151488
- Publication date May 18, 2023
- EUGENUS, INC.
- Vinayak Veer VATS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-LAYER DEPOSITION AND TREATMENT OF SILICON NITRIDE FILMS
- Publication number 20220028680
- Publication date Jan 27, 2022
- Applied Materials, Inc.
- Vinayak Veer Vats
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS DEVELOPMENT VISUALIZATION TOOL
- Publication number 20200202044
- Publication date Jun 25, 2020
- Applied Materials, Inc.
- Vinayak Veer Vats
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEQUENTIAL DEPOSITION AND HIGH FREQUENCY PLASMA TREATMENT OF DEPOSI...
- Publication number 20200176241
- Publication date Jun 4, 2020
- Applied Materials, Inc.
- Vinayak Veer Vats
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PULSED PLASMA DEPOSITION ETCH STEP COVERAGE IMPROVEMENT
- Publication number 20190385844
- Publication date Dec 19, 2019
- Applied Materials, Inc.
- Vinayak Veer VATS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-REGION DIFFUSION BARRIER CONTAINING TITANIUM, SILICON AND NIT...
- Publication number 20180350657
- Publication date Dec 6, 2018
- EUGENUS, INC.
- Vinayak Veer Vats
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TiSiN Coating Method
- Publication number 20180347040
- Publication date Dec 6, 2018
- EUGENUS, INC.
- Vinayak Veer VATS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Vinayak Veer VATS

Person

Patents Grantslast 30 patents

Multi-region diffusion barrier containing titanium, silicon and nit...

TiSiN coating method

Multi-layer deposition and treatment of silicon nitride films

Sequential deposition and high frequency plasma treatment of deposi...

Process development visualization tool

Pulsed plasma deposition etch step coverage improvement

Patents Applicationslast 30 patents

MULTI-REGION DIFFUSION BARRIER CONTAINING TITANIUM, SILICON AND NIT...

DOPED SILICON-CONTAINING MATERIALS WITH INCREASED ELECTRICAL, MECHA...

TISIN COATING METHOD

MULTI-LAYER DEPOSITION AND TREATMENT OF SILICON NITRIDE FILMS

PROCESS DEVELOPMENT VISUALIZATION TOOL

SEQUENTIAL DEPOSITION AND HIGH FREQUENCY PLASMA TREATMENT OF DEPOSI...

PULSED PLASMA DEPOSITION ETCH STEP COVERAGE IMPROVEMENT

MULTI-REGION DIFFUSION BARRIER CONTAINING TITANIUM, SILICON AND NIT...

TiSiN Coating Method