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Vinayan C. Menon
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Hopewell Junction, NY, US
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Patents Grants
last 30 patents
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Patent Grant
Alignment data based process control system
Patent number
9,360,858
Issue date
Jun 7, 2016
GLOBALFOUNDRIES INC.
Christopher P. Ausschnitt
G05 - CONTROLLING REGULATING
Information
Patent Grant
Alignment marks for multi-exposure lithography
Patent number
8,592,110
Issue date
Nov 26, 2013
International Business Machines Corporation
Allen H. Gabor
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment marks for multi-exposure lithography
Patent number
8,455,162
Issue date
Jun 4, 2013
International Business Machines Corporation
Allen H. Gabor
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
ALIGNMENT MARKS FOR MULTI-EXPOSURE LITHOGRAPHY
Publication number
20130177840
Publication date
Jul 11, 2013
International Business Machines Corporation
Allen H. Gabor
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ALIGNMENT DATA BASED PROCESS CONTROL SYSTEM
Publication number
20130041494
Publication date
Feb 14, 2013
International Business Machines Corporation
Christopher P. Ausschnitt
G05 - CONTROLLING REGULATING
Information
Patent Application
ALIGNMENT MARKS FOR MULTI-EXPOSURE LITHOGRAPHY
Publication number
20130001193
Publication date
Jan 3, 2013
International Business Machines Corporation
Allen H. Gabor
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY