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Temperature controlled showerhead
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Patent number 10,584,415
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Issue date Mar 10, 2020
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Novellus Systems, Inc.
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Henner Meinhold
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Temperature controlled showerhead
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Patent number 10,221,484
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Issue date Mar 5, 2019
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Novellus Systems, Inc.
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Henner W. Meinhold
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Temperature controlled showerhead
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Patent number 9,476,120
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Issue date Oct 25, 2016
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Novellus Systems, Inc.
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Henner Meinhold
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Temperature controlled showerhead
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Patent number 8,673,080
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Issue date Mar 18, 2014
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Novellus Systems, Inc.
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Henner Meinhold
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Temperature controlled showerhead
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Patent number 8,137,467
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Issue date Mar 20, 2012
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Novellus Systems, Inc.
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Henner Meinhold
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...