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Vincent C. Lee
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Ion beam deposition target life enhancement
Patent number
11,901,167
Issue date
Feb 13, 2024
Plasma-Therm NES LLC
Sarpangala Hariharakeshava Hegde
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Scanning ion beam etch
Patent number
11,646,171
Issue date
May 9, 2023
Plasma-Therm NES LLC
Sarpangala Hariharakeshava Hegde
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning ion beam etch
Patent number
11,227,741
Issue date
Jan 18, 2022
Plasma-Therm NES LLC
Sarpangala Hariharakeshava Hegde
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer stage for symmetric wafer processing
Patent number
9,863,036
Issue date
Jan 9, 2018
Plasma-Therm NES LLC
Sarpangala H. Hegde
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Powered anode for ion source for DLC and reactive processes
Patent number
9,865,436
Issue date
Jan 9, 2018
Plasma-Therm NES LLC
Sarpangala H. Hegde
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Advanced multi-workpiece processing chamber
Patent number
9,184,072
Issue date
Nov 10, 2015
Mattson Technology, Inc.
Daniel J. Devine
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
ION BEAM DEPOSITION TARGET LIFE ENHANCEMENT
Publication number
20230335383
Publication date
Oct 19, 2023
Plasma-Therm NES LLC
Sarpangala Hariharakeshava Hegde
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING ION BEAM DEPOSITION AND ETCH
Publication number
20220189727
Publication date
Jun 16, 2022
Plasma-Therm NES LLC
Sarpangala Hariharakeshava Hegde
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Scanning Ion Beam Etch
Publication number
20220084779
Publication date
Mar 17, 2022
Plasma-Therm NES LLC
Sarpangala Hariharakeshava Hegde
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Scanning Ion Beam Etch
Publication number
20190341221
Publication date
Nov 7, 2019
Plasma-Therm NES LLC
Sarpangala Hariharakeshava Hegde
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER STAGE FOR SYMMETRIC WAFER PROCESSING
Publication number
20150307986
Publication date
Oct 29, 2015
NANO ETCH SYSTEMS, INC.
Sarpangala H. Hegde
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ADVANCED MULTI-WORKPIECE PROCESSING CHAMBER
Publication number
20090028761
Publication date
Jan 29, 2009
Daniel J. Devine
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Seal arrangement with corrosion barrier and method
Publication number
20070012251
Publication date
Jan 18, 2007
Martin Zucker
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...