Vincent C. Lee

Person

  • Fremont, CA, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Ion beam deposition target life enhancement

    • Patent number 11,901,167
    • Issue date Feb 13, 2024
    • Plasma-Therm NES LLC
    • Sarpangala Hariharakeshava Hegde
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Scanning ion beam etch

    • Patent number 11,646,171
    • Issue date May 9, 2023
    • Plasma-Therm NES LLC
    • Sarpangala Hariharakeshava Hegde
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Scanning ion beam etch

    • Patent number 11,227,741
    • Issue date Jan 18, 2022
    • Plasma-Therm NES LLC
    • Sarpangala Hariharakeshava Hegde
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer stage for symmetric wafer processing

    • Patent number 9,863,036
    • Issue date Jan 9, 2018
    • Plasma-Therm NES LLC
    • Sarpangala H. Hegde
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Powered anode for ion source for DLC and reactive processes

    • Patent number 9,865,436
    • Issue date Jan 9, 2018
    • Plasma-Therm NES LLC
    • Sarpangala H. Hegde
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Advanced multi-workpiece processing chamber

    • Patent number 9,184,072
    • Issue date Nov 10, 2015
    • Mattson Technology, Inc.
    • Daniel J. Devine
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

  • Information Patent Application

    ION BEAM DEPOSITION TARGET LIFE ENHANCEMENT

    • Publication number 20230335383
    • Publication date Oct 19, 2023
    • Plasma-Therm NES LLC
    • Sarpangala Hariharakeshava Hegde
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SCANNING ION BEAM DEPOSITION AND ETCH

    • Publication number 20220189727
    • Publication date Jun 16, 2022
    • Plasma-Therm NES LLC
    • Sarpangala Hariharakeshava Hegde
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Scanning Ion Beam Etch

    • Publication number 20220084779
    • Publication date Mar 17, 2022
    • Plasma-Therm NES LLC
    • Sarpangala Hariharakeshava Hegde
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Scanning Ion Beam Etch

    • Publication number 20190341221
    • Publication date Nov 7, 2019
    • Plasma-Therm NES LLC
    • Sarpangala Hariharakeshava Hegde
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER STAGE FOR SYMMETRIC WAFER PROCESSING

    • Publication number 20150307986
    • Publication date Oct 29, 2015
    • NANO ETCH SYSTEMS, INC.
    • Sarpangala H. Hegde
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ADVANCED MULTI-WORKPIECE PROCESSING CHAMBER

    • Publication number 20090028761
    • Publication date Jan 29, 2009
    • Daniel J. Devine
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Seal arrangement with corrosion barrier and method

    • Publication number 20070012251
    • Publication date Jan 18, 2007
    • Martin Zucker
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...