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Vorst, BE
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Patents Grants
last 30 patents
Information
Patent Grant
Metrology method for a semiconductor manufacturing process
Patent number
10,824,081
Issue date
Nov 3, 2020
Imec VZW
Christopher Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method for a semiconductor manufacturing process
Patent number
10,656,535
Issue date
May 19, 2020
Imec VZW
Christopher Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for semiconductor manufacturing
Patent number
10,481,504
Issue date
Nov 19, 2019
Imec VZW
Christopher Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for hotspot detection and ranking of a lithographic mask
Patent number
9,874,821
Issue date
Jan 23, 2018
Imec VZW
Sandip Halder
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Metrology Method for a Semiconductor Manufacturing Process
Publication number
20200233317
Publication date
Jul 23, 2020
IMEC vzw
Christopher Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and Apparatus for Semiconductor Manufacturing
Publication number
20200050112
Publication date
Feb 13, 2020
IMEC vzw
Christopher Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and Apparatus for Semiconductor Manufacturing
Publication number
20190137881
Publication date
May 9, 2019
IMEC vzw
Christopher Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Method for a Semiconductor Manufacturing Process
Publication number
20180284624
Publication date
Oct 4, 2018
IMEC vzw
Christopher Ausschnitt
G01 - MEASURING TESTING
Information
Patent Application
Method for Hotspot Detection and Ranking of a Lithographic Mask
Publication number
20160313647
Publication date
Oct 27, 2016
IMEC vzw
Sandip Halder
G01 - MEASURING TESTING